public void TestMethod1()//OK { try { using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real")) { halContext.MvaCfBootup(); halContext.MvaCfLoad(); var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp; var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer; unv.HalConnect();//需要先將MacHalUniversal建立連線,各Assembly的Hal建立連線時,才能讓PLC的連線成功 mt.HalConnect(); //1. Mask Robot (無夾持光罩) 從Home點移動至Load Port A mt.RobotMoving(true); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile()); mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile()); mt.RobotMoving(false); } } catch (Exception ex) { throw ex; } }
public void TestMethod1()//OK { try { using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real")) { halContext.MvaCfBootup(); halContext.MvaCfLoad(); var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp; var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer; var ic = halContext.HalDevices[EnumMacDeviceId.inspectionch_assembly.ToString()] as MacHalInspectionCh; var lpa = halContext.HalDevices[EnumMacDeviceId.loadportA_assembly.ToString()] as MacHalLoadPort; unv.HalConnect();//需要先將MacHalUniversal建立連線,各Assembly的Hal建立連線時,才能讓PLC的連線成功 mt.HalConnect(); lpa.HalConnect(); ic.HalConnect(); ic.Initial(); //1. Mask Robot (無夾持光罩) 從Home點移動至Inspection Chamber ic.SetRobotIntrude(true); mt.RobotMoving(true); mt.ChangeDirection(pathFileObj.InspChHomePathFile()); mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile()); mt.RobotMoving(false); //2. 雷射sensor可以偵測到Mask Robot進入Inspection Chamber & 報值 var about = ic.ReadRobotPosLeftRight(); var UpDown = ic.ReadRobotPosUpDown(); mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile()); ic.SetRobotIntrude(false); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); mt.RobotMoving(false); } } catch (Exception ex) { throw ex; } }
public void TestMethod1()//OK { try { using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real")) { halContext.MvaCfBootup(); halContext.MvaCfLoad(); var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp; var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer; var lpb = halContext.HalDevices[EnumMacDeviceId.loadportB_assembly.ToString()] as MacHalLoadPort; var lpa = halContext.HalDevices[EnumMacDeviceId.loadportA_assembly.ToString()] as MacHalLoadPort; var ic = halContext.HalDevices[EnumMacDeviceId.inspectionch_assembly.ToString()] as MacHalInspectionCh; unv.HalConnect();//需要先將MacHalUniversal建立連線,各Assembly的Hal建立連線時,才能讓PLC的連線成功 mt.HalConnect(); lpb.HalConnect(); lpa.HalConnect(); ic.HalConnect(); //1. 光罩放置於Load Port B POD內 //2~5 Load Poat B Dock lpb.Dock(); //6. (編號7-CCD): 開啟光源 -> 拍照(FOV正確) -> 關閉光源 lpb.LightForLoadPortBSetValue(255); lpb.Camera_LoadPortB_CapToSave("D:/Image/LP/LPB/Insp", "jpg"); lpb.LightForLoadPortBSetValue(0); //7.Mask Robot從Home點移動至Load Port B mt.RobotMoving(true); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile()); mt.RobotMoving(false); //8. Mask Robot上的傾斜角度傳感器可報值 & 位於水平狀態 var Level = mt.ReadLevel(); //9. Mask Robot在Load Port B 進行光罩夾取 mt.Clamp(1); //10. Mask Robot將光罩從Load Port B移動至Recognizer Chamber處 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile()); mt.ExePathMove(pathFileObj.FromLPHomeToBarcodeReaderPathFile()); mt.RobotMoving(false); //11. (編號8 - Barcode CCD)拍攝mask barcode, 並能成功辨識ID lpa.LightForBarcodeReaderSetValue(2); lpa.Camera_Barcode_CapToSave("D:/Image/LP/LPA/Barcode", "jpg"); lpa.LightForBarcodeReaderSetValue(0); //12. Mask Robot將光罩從Recognizer移動至Inspection Chamber Entry處 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromBarcodeReaderToLPHomePathFile()); mt.ChangeDirection(pathFileObj.InspChHomePathFile()); ic.SetRobotIntrude(true); mt.ExePathMove(pathFileObj.FromICHomeToICBackSidePathFile()); mt.ExePathMove(pathFileObj.FromICBackSideToICStagePathFile()); mt.RobotMoving(false); //13. Mask Robot將光罩從Inspection Chamber Entry處, 移回Load Port B mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromICStageToICBackSidePathFile()); mt.ExePathMove(pathFileObj.FromICBackSideToICHomePathFile()); ic.SetRobotIntrude(false); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile()); mt.RobotMoving(false); //14. Mask Robot將光罩放置於Load Port B POD內 mt.Unclamp(); //15. Mask Robot (無夾持光罩) 從Load Port B移回Home點 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile()); mt.RobotMoving(false); //16. (編號7-CCD): 開啟光源 -> 拍照(FOV正確) -> 關閉光源 lpb.LightForLoadPortBSetValue(255); lpb.Camera_LoadPortB_CapToSave("D:/Image/LP/LPB/Insp", "jpg"); lpb.LightForLoadPortBSetValue(0); //17~20 Load Port B Undock lpb.Undock(); } } catch (Exception ex) { throw ex; } }
public void TestMethod1()//OK { try { using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real")) { halContext.MvaCfBootup(); halContext.MvaCfLoad(); var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp; var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer; var cc = halContext.HalDevices[EnumMacDeviceId.clean_assembly.ToString()] as MacHalCleanCh; unv.HalConnect();//需要先將MacHalUniversal建立連線,各Assembly的Hal建立連線時,才能讓PLC的連線成功 mt.HalConnect(); cc.HalConnect(); //1. 光罩放置於Load Port A的Pod上 //2.Mask Robot從Home點移動至Load Port A mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile()); mt.RobotMoving(false); //3. Mask Robot在Load Port A的Pod 內進行光罩夾取 mt.Clamp(1); //4. Mask Robot將光罩從Load Port A移動至Clean Chamber內 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile()); mt.ChangeDirection(pathFileObj.CleanChHomePathFile()); mt.ExePathMove(pathFileObj.FromCCHomeToCCFrontSidePathFile()); mt.RobotMoving(false); //5. 雷射sensor可以偵測到Mask Robot進入Clean Chamber & 報值 var About = cc.ReadRobotPosLeftRight(); var UpDown = cc.ReadRobotPosUpDown(); //6. Mask Robot模擬吹除轉動Mask行為 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromCCFrontSideToCleanPathFile()); mt.ExePathMove(pathFileObj.FromFrontSideCleanFinishToCCPathFile()); mt.ExePathMove(pathFileObj.FromCCFrontSideToCapturePathFile()); mt.ExePathMove(pathFileObj.FromFrontSideCaptureFinishToCCPathFile()); mt.RobotMoving(false); //7. 將光罩移動至安全光柵附近, 觸發光柵報值(由人員手動遮斷) var LightCurtain = cc.ReadLightCurtain(); //8. Mask Robot將光罩從Clean Chamber, 移回Load Port A mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromCCFrontSideToCCHomePathFile()); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile()); mt.RobotMoving(false); //9. Mask Robot將光罩放置於Load Port A Pod上 mt.Unclamp(); //10. Mask Robot (無夾持光罩) 從Load Port A移回Home點 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile()); mt.RobotMoving(false); About = 0; UpDown = 0; //11. 重複1~10, 執行Load Port B -> Clean Chamber光罩傳送 //1. 光罩放置於Load Port B的Pod上 //2.Mask Robot從Home點移動至Load Port B mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile()); mt.RobotMoving(false); //3. Mask Robot在Load Port B的Pod 內進行光罩夾取 mt.Clamp(1); //4. Mask Robot將光罩從Load Port B移動至Clean Chamber內 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile()); mt.ChangeDirection(pathFileObj.CleanChHomePathFile()); mt.ExePathMove(pathFileObj.FromCCHomeToCCFrontSidePathFile()); mt.RobotMoving(false); //5. 雷射sensor可以偵測到Mask Robot進入Clean Chamber & 報值 About = cc.ReadRobotPosLeftRight(); UpDown = cc.ReadRobotPosUpDown(); //6. Mask Robot模擬吹除轉動Mask行為 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromCCFrontSideToCleanPathFile()); mt.ExePathMove(pathFileObj.FromFrontSideCleanFinishToCCPathFile()); mt.ExePathMove(pathFileObj.FromCCFrontSideToCapturePathFile()); mt.ExePathMove(pathFileObj.FromFrontSideCaptureFinishToCCPathFile()); mt.RobotMoving(false); //7. 將光罩移動至安全光柵附近, 觸發光柵報值(由人員手動遮斷) LightCurtain = cc.ReadLightCurtain(); //8. Mask Robot將光罩從Clean Chamber, 移回Load Port B mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromCCFrontSideToCCHomePathFile()); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile()); mt.RobotMoving(false); //9. Mask Robot將光罩放置於Load Port B Pod上 mt.Unclamp(); //10. Mask Robot (無夾持光罩) 從Load Port B移回Home點 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile()); mt.RobotMoving(false); } } catch (Exception ex) { throw ex; } }
public void TestMethod1()//OK { try { using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real")) { halContext.MvaCfBootup(); halContext.MvaCfLoad(); var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp; var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer; var ic = halContext.HalDevices[EnumMacDeviceId.inspectionch_assembly.ToString()] as MacHalInspectionCh; var os = halContext.HalDevices[EnumMacDeviceId.openstage_assembly.ToString()] as MacHalOpenStage; unv.HalConnect();//需要先將MacHalUniversal建立連線,各Assembly的Hal建立連線時,才能讓PLC的連線成功 mt.HalConnect(); ic.HalConnect(); os.HalConnect(); uint BoxType = 1;//1:鐵盒 , 2:水晶盒 os.Initial(); //1. 光罩放置於Open Stage上的光罩鐵盒內 os.SetBoxType(BoxType); os.SortClamp(); os.Vacuum(true); os.SortUnclamp(); os.Lock(); var BoxWeight = os.ReadWeightOnStage(); if (os.ReadCoverSensor().Item2 == false) { throw new Exception("Box status was not closed"); } os.Close(); os.Clamp(); os.Open(); if (os.ReadCoverSensor().Item1 == false) { throw new Exception("Box status was not opened"); } //2. (編號9 - CCD): 開啟光源->拍照(FOV正確)->關閉光源 os.LightForFrontBarDfsSetValue(85); //bar 0~255 os.LightForSideBarDfsSetValue(3); //bar 0~255 os.LightForTopBarDfsSetValue(50); //bar 0~255 os.Camera_Top_CapToSave("D:/Image/OS/Top", "jpg"); os.LightForFrontBarDfsSetValue(0); os.LightForSideBarDfsSetValue(0); os.LightForTopBarDfsSetValue(0); //3. (編號12 - CCD): 開啟光源->拍照(FOV正確)->關閉光源 os.LightForFrontBarDfsSetValue(85); //bar 0~255 os.LightForSideBarDfsSetValue(250); //bar 0~255 os.LightForTopBarDfsSetValue(20); //bar 0~255 os.Camera_Side_CapToSave("D:/Image/OS/Side", "jpg"); os.LightForFrontBarDfsSetValue(0); os.LightForSideBarDfsSetValue(0); os.LightForTopBarDfsSetValue(0); //4. Mask Robot從Home點移動至Open Stage mt.RobotMoving(true); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); os.SetRobotIntrude(false, true); mt.ExePathMove(pathFileObj.FromLPHomeToOSPathFile()); if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromOSToIronBoxPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromOSToCrystalBoxPathFile()); } mt.RobotMoving(false); //5. Mask Robot上的傾斜角度傳感器可報值 & 位於水平狀態 var Level = mt.ReadLevel(); //6. Mask Robot在Open Stage進行光罩夾取(clamp光罩) mt.Clamp(1); //7. Mask Robot將光罩從Open Stage移動至Inspection Chamber Entry處 mt.RobotMoving(true); if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromIronBoxToOSPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromCrystalBoxToOSPathFile()); } mt.ExePathMove(pathFileObj.FromOSToLPHomePathFile()); os.SetRobotIntrude(false, false); mt.ChangeDirection(pathFileObj.InspChHomePathFile()); ic.SetRobotIntrude(true); mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICStagePathFile()); mt.RobotMoving(false); //8. Mask Robot將光罩從Inspection Chamber Entry處, 移回Open Stage mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromICStageToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile()); ic.SetRobotIntrude(false); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); os.SetRobotIntrude(false, true); mt.ExePathMove(pathFileObj.FromLPHomeToOSPathFile()); if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromOSToIronBoxPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromOSToCrystalBoxPathFile()); } mt.RobotMoving(false); //9. Mask Robot將光罩放置於Open Stage上的光罩鐵盒內(release光罩) mt.Unclamp(); //10. Mask Robot(無夾持光罩) 從Open Stage移回Home點 mt.RobotMoving(true); if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromIronBoxToOSPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromCrystalBoxToOSPathFile()); } mt.ExePathMove(pathFileObj.FromOSToLPHomePathFile()); os.SetRobotIntrude(false, false); mt.RobotMoving(false); //11. (編號9 - CCD): 開啟光源->拍照(FOV正確)->關閉光源 os.LightForFrontBarDfsSetValue(85); //bar 0~255 os.LightForSideBarDfsSetValue(3); //bar 0~255 os.LightForTopBarDfsSetValue(50); //bar 0~255 os.Camera_Top_CapToSave("D:/Image/OS/Top", "jpg"); os.LightForFrontBarDfsSetValue(0); os.LightForSideBarDfsSetValue(0); os.LightForTopBarDfsSetValue(0); //12. (編號12 - CCD): 開啟光源->拍照(FOV正確)->關閉光源 os.LightForFrontBarDfsSetValue(85); //bar 0~255 os.LightForSideBarDfsSetValue(250); //bar 0~255 os.LightForTopBarDfsSetValue(20); //bar 0~255 os.Camera_Side_CapToSave("D:/Image/OS/Side", "jpg"); os.LightForFrontBarDfsSetValue(0); os.LightForSideBarDfsSetValue(0); os.LightForTopBarDfsSetValue(0); os.Close(); os.Unclamp(); os.Vacuum(false); os.Lock(); BoxType = 2; //13. 重複1~12, 完成光罩水晶盒內的光罩clamp & release測試 //1. 光罩放置於Open Stage上的光罩水晶盒內 os.SetBoxType(BoxType); os.SortClamp(); os.Vacuum(true); os.SortUnclamp(); os.Lock(); BoxWeight = os.ReadWeightOnStage(); if (os.ReadCoverSensor().Item2 == false) { throw new Exception("Box status was not closed"); } os.Close(); os.Clamp(); os.Open(); if (os.ReadCoverSensor().Item1 == false) { throw new Exception("Box status was not opened"); } //2. (編號9 - CCD): 開啟光源->拍照(FOV正確)->關閉光源 os.LightForFrontBarDfsSetValue(85); //bar 0~255 os.LightForSideBarDfsSetValue(3); //bar 0~255 os.LightForTopBarDfsSetValue(50); //bar 0~255 os.Camera_Top_CapToSave("D:/Image/OS/Top", "jpg"); os.LightForFrontBarDfsSetValue(0); os.LightForSideBarDfsSetValue(0); os.LightForTopBarDfsSetValue(0); //3. (編號12 - CCD): 開啟光源->拍照(FOV正確)->關閉光源 os.LightForFrontBarDfsSetValue(85); //bar 0~255 os.LightForSideBarDfsSetValue(250); //bar 0~255 os.LightForTopBarDfsSetValue(20); //bar 0~255 os.Camera_Side_CapToSave("D:/Image/OS/Side", "jpg"); os.LightForFrontBarDfsSetValue(0); os.LightForSideBarDfsSetValue(0); os.LightForTopBarDfsSetValue(0); //4. Mask Robot從Home點移動至Open Stage mt.RobotMoving(true); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); os.SetRobotIntrude(false, true); mt.ExePathMove(pathFileObj.FromLPHomeToOSPathFile()); if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromOSToIronBoxPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromOSToCrystalBoxPathFile()); } mt.RobotMoving(false); //5. Mask Robot上的傾斜角度傳感器可報值 & 位於水平狀態 Level = mt.ReadLevel(); //6. Mask Robot在Open Stage進行光罩夾取(clamp光罩) mt.Clamp(1); //7. Mask Robot將光罩從Open Stage移動至Inspection Chamber Entry處 mt.RobotMoving(true); if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromIronBoxToOSPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromCrystalBoxToOSPathFile()); } mt.ExePathMove(pathFileObj.FromOSToLPHomePathFile()); os.SetRobotIntrude(false, false); mt.ChangeDirection(pathFileObj.InspChHomePathFile()); ic.SetRobotIntrude(true); mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICStagePathFile()); mt.RobotMoving(false); //8. Mask Robot將光罩從Inspection Chamber Entry處, 移回Open Stage mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromICStageToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile()); ic.SetRobotIntrude(false); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); os.SetRobotIntrude(false, true); mt.ExePathMove(pathFileObj.FromLPHomeToOSPathFile()); if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromOSToIronBoxPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromOSToCrystalBoxPathFile()); } mt.RobotMoving(false); //9. Mask Robot將光罩放置於Open Stage上的光罩水晶盒內(release光罩) mt.Unclamp(); //10. Mask Robot(無夾持光罩) 從Open Stage移回Home點 mt.RobotMoving(true); if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromIronBoxToOSPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromCrystalBoxToOSPathFile()); } mt.ExePathMove(pathFileObj.FromOSToLPHomePathFile()); os.SetRobotIntrude(false, false); mt.RobotMoving(false); //11. (編號9 - CCD): 開啟光源->拍照(FOV正確)->關閉光源 os.LightForFrontBarDfsSetValue(85); //bar 0~255 os.LightForSideBarDfsSetValue(3); //bar 0~255 os.LightForTopBarDfsSetValue(50); //bar 0~255 os.Camera_Top_CapToSave("D:/Image/OS/Top", "jpg"); os.LightForFrontBarDfsSetValue(0); os.LightForSideBarDfsSetValue(0); os.LightForTopBarDfsSetValue(0); //12. (編號12 - CCD): 開啟光源->拍照(FOV正確)->關閉光源 os.LightForFrontBarDfsSetValue(85); //bar 0~255 os.LightForSideBarDfsSetValue(250); //bar 0~255 os.LightForTopBarDfsSetValue(20); //bar 0~255 os.Camera_Side_CapToSave("D:/Image/OS/Side", "jpg"); os.LightForFrontBarDfsSetValue(0); os.LightForSideBarDfsSetValue(0); os.LightForTopBarDfsSetValue(0); os.Close(); os.Unclamp(); os.Vacuum(false); os.Lock(); } } catch (Exception ex) { throw ex; } }
public void TestMethod1()//OK { try { using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real")) { halContext.MvaCfBootup(); halContext.MvaCfLoad(); var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp; var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer; var ic = halContext.HalDevices[EnumMacDeviceId.inspectionch_assembly.ToString()] as MacHalInspectionCh; unv.HalConnect();//需要先將MacHalUniversal建立連線,各Assembly的Hal建立連線時,才能讓PLC的連線成功 mt.HalConnect(); ic.HalConnect(); ic.Initial(); //1. 光罩放置於Inspection Chamber Stage上 //2. (編號2-CCD): 開啟光源 -> 拍照(FOV正確) -> 關閉光源 ic.LightForBackLineSetValue(120); ic.Camera_SideDfs_CapToSave("D:/Image/IC/SigeDfs", "jpg"); ic.LightForBackLineSetValue(0); //3. (編號3-CCD): 開啟光源 -> 拍照(FOV正確) -> 關閉光源 ic.LightForLeftLineSetValue(255); ic.LightForBackLineSetValue(255); ic.LightForTopCrlDfsSetValue(39); ic.Camera_TopDfs_CapToSave("D:/Image/IC/TopDfs", "jpg"); ic.LightForLeftLineSetValue(0); ic.LightForBackLineSetValue(0); ic.LightForTopCrlDfsSetValue(0); //4. Mask Robot從Home點移動至Inspection Chamber mt.RobotMoving(true); mt.ChangeDirection(pathFileObj.InspChHomePathFile()); ic.SetRobotIntrude(true); mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICStagePathFile()); mt.RobotMoving(false); //5. 雷射sensor可以偵測到Mask Robot進入Inspection Chamber &報值 var About = ic.ReadRobotPosLeftRight(); var UpDown = ic.ReadRobotPosUpDown(); //6. Mask Robot在Inspection Chamber 內進行光罩夾取 mt.Clamp(1); //7. Mask Robot將光罩從Inspection Chamber移動至Load Port A/ B Entry處 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromICStageToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile()); ic.SetRobotIntrude(false); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile()); mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile()); mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile()); mt.RobotMoving(false); //8. Mask Robot將光罩從Load Port A / B Entry處, 移回Inspection Chamber mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile()); mt.ChangeDirection(pathFileObj.InspChHomePathFile()); ic.SetRobotIntrude(true); mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICStagePathFile()); mt.RobotMoving(false); //9. 雷射sensor可以偵測到Mask Robot進入Inspection Chamber &報值 About = ic.ReadRobotPosLeftRight(); UpDown = ic.ReadRobotPosUpDown(); //10. Mask Robot將光罩放置於Inspection Chamber Stage上 mt.Unclamp(); //11. (編號2-CCD): 開啟光源->拍照(FOV正確)->關閉光源 ic.LightForBackLineSetValue(120); ic.Camera_SideDfs_CapToSave("D:/Image/IC/SigeDfs", "jpg"); ic.LightForBackLineSetValue(0); //12. (編號3-CCD): 開啟光源->拍照(FOV正確)->關閉光源 ic.LightForLeftLineSetValue(255); ic.LightForBackLineSetValue(255); ic.LightForTopCrlDfsSetValue(39); ic.Camera_TopDfs_CapToSave("D:/Image/IC/TopDfs", "jpg"); ic.LightForLeftLineSetValue(0); ic.LightForBackLineSetValue(0); ic.LightForTopCrlDfsSetValue(0); //13. Mask Robot(無夾持光罩) 從Inspection Chamber移回Home點 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromICStageToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile()); ic.SetRobotIntrude(false); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); mt.RobotMoving(false); } } catch (Exception ex) { throw ex; } }
public void TestMethod1()//OK { try { using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real")) { halContext.MvaCfBootup(); halContext.MvaCfLoad(); var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp; var cc = halContext.HalDevices[EnumMacDeviceId.clean_assembly.ToString()] as MacHalCleanCh; var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer; var ic = halContext.HalDevices[EnumMacDeviceId.inspectionch_assembly.ToString()] as MacHalInspectionCh; unv.HalConnect();//需要先將MacHalUniversal建立連線,各Assembly的Hal建立連線時,才能讓PLC的連線成功 cc.HalConnect(); mt.HalConnect(); ic.HalConnect(); ic.Initial(); //光罩放置於Inspection Chamber Stage上,先到Inspection Chamber夾取Mask mt.RobotMoving(true); mt.ChangeDirection(pathFileObj.InspChHomePathFile()); ic.SetRobotIntrude(true); mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICStagePathFile()); mt.RobotMoving(false); mt.Clamp(1); mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromICStageToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile()); ic.SetRobotIntrude(false); mt.RobotMoving(false); //1. Mask Robot夾持光罩, 並移動至Clean Chamber內 mt.RobotMoving(true); mt.ChangeDirection(pathFileObj.CleanChHomePathFile()); mt.ExePathMove(pathFileObj.FromCCHomeToCCFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromCCFrontSideToCapturePathFile()); mt.RobotMoving(false); //2. (編號5 - CCD): 開啟光源->拍照(FOV正確, 可以看到particle)->關閉光源 cc.LightForInspSetValue(600); cc.Camera_Insp_CapToSave("D:/Image/CC/Insp", "jpg"); cc.LightForInspSetValue(0); //3. Mask Robot移回Home點 mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromFrontSideCaptureFinishToCCPathFile()); mt.ExePathMove(pathFileObj.FromCCFrontSideToCCHomePathFile()); mt.ChangeDirection(pathFileObj.InspChHomePathFile()); ic.SetRobotIntrude(true); mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICStagePathFile()); mt.RobotMoving(false); mt.Unclamp(); mt.RobotMoving(true); mt.ExePathMove(pathFileObj.FromICStageToICFrontSidePathFile()); mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile()); ic.SetRobotIntrude(false); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); mt.RobotMoving(false); } } catch (Exception ex) { throw ex; } }
public void TestMethod1()//OK { try { using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real")) { halContext.MvaCfBootup(); halContext.MvaCfLoad(); var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp; var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer; var os = halContext.HalDevices[EnumMacDeviceId.openstage_assembly.ToString()] as MacHalOpenStage; unv.HalConnect();//需要先將MacHalUniversal建立連線,各Assembly的Hal建立連線時,才能讓PLC的連線成功 mt.HalConnect(); os.HalConnect(); uint BoxType = 1;//1:鐵盒 , 2:水晶盒 os.Initial(); os.SetBoxType(BoxType); os.SortClamp(); os.Vacuum(true); os.SortUnclamp(); os.Lock(); if (os.ReadCoverSensor().Item2 == false) { throw new Exception("Box status was not closed"); } os.Close(); os.Clamp(); os.Open(); if (os.ReadCoverSensor().Item1 == false) { throw new Exception("Box status was not opened"); } //1. Mask Robot (無夾持光罩) 從Home點移動至Open Stage mt.RobotMoving(true); mt.ChangeDirection(pathFileObj.LoadPortHomePathFile()); os.SetRobotIntrude(null, true); mt.ExePathMove(pathFileObj.FromLPHomeToOSPathFile()); if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromOSToIronBoxPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromOSToCrystalBoxPathFile()); } if (BoxType == 1) { mt.ExePathMove(pathFileObj.FromIronBoxToOSPathFile()); } else if (BoxType == 2) { mt.ExePathMove(pathFileObj.FromCrystalBoxToOSPathFile()); } mt.ExePathMove(pathFileObj.FromOSToLPHomePathFile()); os.SetRobotIntrude(null, false); mt.RobotMoving(false); } } catch (Exception ex) { throw ex; } }