int GetLoadlockSlot(WaferType wType) { int nSlot = -1; switch (wType) { case WaferType.CARRIER: nSlot = 0; break; case WaferType.DEVICE: nSlot = 1; break; case WaferType.BONDED: nSlot = 2; break; default: System.Diagnostics.Debug.Fail("타입이 이상함"); break; } return(nSlot); }
public WaferData(EFEM_TYPE efType, WaferType wType, int nSlot) { this.efemType = efType; this.waferType = wType; this.nSlot = nSlot; Init(); }
private int TimeCoolingEnd; // 쿨링 끝 public WaferData() { efemType = EFEM_TYPE.A_CARRIER; waferType = WaferType.CARRIER; nSlot = 0; bIsPreAlign = false; bIsPostAlign = false; bIsLami = false; bIsBond = false; bIsHP = false; }
/// <summary> /// ATM에서 LoadLock으로 이동 /// </summary> /// <param name="wType">Wafer Type</param> /// <returns></returns> public bool LoadingAtmToLoadLock(WaferType wType, HAND arm) { int nSlot = GetLoadlockSlot(wType); if (robotATM[(int)arm] == null || loadlock[nSlot] != null) { return(false); } loadlock[nSlot] = robotATM[(int)arm]; robotATM[(int)arm] = null; Save(); return(true); }
/// <summary> /// Loadlock에서 VTM으로 이동 /// </summary> /// <param name="wType">로드락 슬롯</param> /// <returns></returns> public bool LoadingLoadLockToVtm(WaferType wType, HAND arm) { int nSlot = GetLoadlockSlot(wType); if (loadlock[nSlot] == null || robotVTM[(int)arm] != null) { return(false); } robotVTM[(int)arm] = loadlock[nSlot]; loadlock[0] = null; loadlock[1] = null; Save(); return(true); }
public void Bonding() { waferType = WaferType.BONDED; bIsBond = true; }