Пример #1
0
        int GetLoadlockSlot(WaferType wType)
        {
            int nSlot = -1;

            switch (wType)
            {
            case WaferType.CARRIER:
                nSlot = 0;
                break;

            case WaferType.DEVICE:
                nSlot = 1;
                break;

            case WaferType.BONDED:
                nSlot = 2;
                break;

            default:
                System.Diagnostics.Debug.Fail("타입이 이상함");
                break;
            }

            return(nSlot);
        }
Пример #2
0
 public WaferData(EFEM_TYPE efType, WaferType wType, int nSlot)
 {
     this.efemType  = efType;
     this.waferType = wType;
     this.nSlot     = nSlot;
     Init();
 }
Пример #3
0
        private int TimeCoolingEnd;     // 쿨링 끝

        public WaferData()
        {
            efemType     = EFEM_TYPE.A_CARRIER;
            waferType    = WaferType.CARRIER;
            nSlot        = 0;
            bIsPreAlign  = false;
            bIsPostAlign = false;
            bIsLami      = false;
            bIsBond      = false;
            bIsHP        = false;
        }
Пример #4
0
        /// <summary>
        /// ATM에서 LoadLock으로 이동
        /// </summary>
        /// <param name="wType">Wafer Type</param>
        /// <returns></returns>
        public bool LoadingAtmToLoadLock(WaferType wType, HAND arm)
        {
            int nSlot = GetLoadlockSlot(wType);

            if (robotATM[(int)arm] == null || loadlock[nSlot] != null)
            {
                return(false);
            }

            loadlock[nSlot]    = robotATM[(int)arm];
            robotATM[(int)arm] = null;

            Save();

            return(true);
        }
Пример #5
0
        /// <summary>
        /// Loadlock에서 VTM으로 이동
        /// </summary>
        /// <param name="wType">로드락 슬롯</param>
        /// <returns></returns>
        public bool LoadingLoadLockToVtm(WaferType wType, HAND arm)
        {
            int nSlot = GetLoadlockSlot(wType);

            if (loadlock[nSlot] == null || robotVTM[(int)arm] != null)
            {
                return(false);
            }

            robotVTM[(int)arm] = loadlock[nSlot];
            loadlock[0]        = null;
            loadlock[1]        = null;

            Save();

            return(true);
        }
Пример #6
0
 public void Bonding()
 {
     waferType = WaferType.BONDED;
     bIsBond   = true;
 }