List <T> InoutCoretypeList <T>(string name, List <T> v, fn <T> Conv)
{
int size = GetNrElements(name);
nodeStack.Push(currentNode);
currentNode = GetNode(name);
v.Clear();
for (int i = 0; i < size; i++)
{
XmlNode node = GetCurrentElement(i);
T res;
if (Conv(node.InnerText.Trim(), out res))
{
v.Add(res);
}
else
{
throw new System.FormatException("Invalid value encountered in Xml-list. Name: '" + name + "', Value: " + node.InnerText.Trim());
}
}
currentNode = nodeStack.Pop();
return(v);
}
public void b()
{
GC.SuppressFinalize(this);
this.a();
this.az.Clear();
this.n = null;
this.ag = null;
this.au = null;
this.at = null;
this.@as = null;
this.ar = null;
this.aq = null;
this.ap = null;
this.ao = null;
this.an = null;
this.am = null;
this.al = null;
this.ak = null;
this.aj = null;
this.ai = null;
this.ah = null;
this.af = null;
this.ae = null;
this.ad = null;
this.ac = null;
this.ab = null;
this.aa = null;
this.z = null;
this.y = null;
this.x = null;
this.w = null;
this.v = null;
this.u = null;
this.t = null;
this.s = null;
this.r = null;
this.q = null;
this.p = null;
this.c = null;
this.av = null;
this.o = null;
this.m = null;
this.l = null;
this.k = null;
this.j = null;
this.i = null;
this.h = null;
this.g = null;
this.f = null;
this.e = null;
this.d = null;
this.b = null;
this.a = null;
this.aw = null;
this.ax = null;
this.ay = null;
}
Newton(fn f, fn df, double x0, byte precision)
{
double tol = GetPrecisionTolerance(precision);
double x1 = x0;
do
{
x0 = x1;
x1 = x0 - f(x0) / df(x0);
}while(tol <= Math.Abs(x1 - x0));
return(Math.Round(x1, precision));
}
public fn Loadlock_Venting()
{
if (!isAcceptRun())
{
return(fn.busy);
}
nPreSeqNo = nSeqNo;
fn fRet = fn.busy;
switch (nSeqNo)
{
case 0:
break;
case 10:
break;
case 20:
fRet = GlobalSeq.autoRun.procLoadlock.Loadlock_Venting();
if (fRet == fn.success)
{
break;
}
else
{
if (fRet == fn.err)
{
//에러 일경우 Output 출력을 Off하자
return(fn.err);
}
}
return(fn.busy);
case 30:
nSeqNo = 0;
return(fn.success);
}
//wrong seq check
if (nSeqNo > 10000)
{
//error occur
return(fn.err);
}
nSeqNo++;
return(fn.busy);
}
// Update is called once per frame
void Update()
{
switch (state)
{
case AIState.Idle:
chasing = false;
break;
case AIState.Wander:
Behavior = Wander;
SelectTarget = WanderSelect;
break;
case AIState.Chase:
chasing = true;
break;
}
Behavior();
}
Secant(fn f, double x0, double x1, byte precision)
{
if (x0 == x1)
{
throw new DivideByZeroException();
}
double tol = GetPrecisionTolerance(precision);
while (tol <= Math.Abs(x1 - x0))
{
double
f0 = f(x0),
f1 = f(x1);
double x2 = x1 - f1 * (x1 - x0) / (f1 - f0);
x0 = x1;
x1 = x2;
}
return(Math.Round(x1, precision));
}
public static b FoldLeft <a, b> (a x, b acc, fn <a, b, b> f)
{
return(f.apply(x, acc));
}
/// <summary>
/// Constructor.
/// </summary>
/// <param name="function">The delegate to assign.</param>
public ImportFunction_Lam(fn function)
{
this.function = function;
}
public ev(CoreManager A_0, PluginHost A_1, PluginCore A_2)
{
this.aw = A_0;
this.ax = A_1;
this.ay = A_2;
this.a = new b2(this.ay);
this.az.Add(this.a);
this.b = new j();
this.az.Add(this.b);
this.d = new aj();
this.az.Add(this.d);
this.e = new cd((FileService)this.aw.get_FileService(), this);
this.az.Add(this.e);
this.f = new d6();
this.az.Add(this.f);
this.g = new dv(this);
this.az.Add(this.g);
this.z = new s(this.aw);
this.az.Add(this.z);
this.h = new cs(this);
this.az.Add(this.h);
this.i = new dg(this);
this.az.Add(this.i);
this.j = new dl(this);
this.az.Add(this.j);
this.k = new eo(this);
this.az.Add(this.k);
this.l = new bh();
this.az.Add(this.l);
this.m = new fq();
this.az.Add(this.m);
this.o = new bw();
this.az.Add(this.o);
this.c = new cLogic(this.g, this.ay, this.z);
this.az.Add(this.c);
this.p = new cj(new cj.a(ad.a), A_1.get_Actions());
this.az.Add(this.p);
this.q = new b5(this.aw, this.ay);
this.az.Add(this.q);
this.r = new cz(this.ay, this.aw, this.ax, this.p);
this.az.Add(this.r);
this.s = new ag();
this.az.Add(this.s);
this.t = new fc(this.aw, this.ay);
this.az.Add(this.t);
this.u = new b0(this.aw, this.ay, this.p);
this.az.Add(this.u);
this.v = new el(this.aw);
this.az.Add(this.v);
this.w = new bd();
this.az.Add(this.w);
this.x = new bv(this.aw);
this.az.Add(this.x);
this.y = new a7(this.aw);
this.az.Add(this.y);
this.n = new fn(this.aw, this.p);
this.az.Add(this.n);
this.aa = new d0(this.aw);
this.az.Add(this.aa);
this.ab = new da(this.p, this.ay);
this.az.Add(this.ab);
this.ac = new bj();
this.az.Add(this.ac);
this.ad = new fs();
this.az.Add(this.ad);
this.ae = new b9();
this.az.Add(this.ae);
this.af = new en();
this.az.Add(this.af);
this.ah = new e0();
this.az.Add(this.ah);
this.ai = new ar();
this.az.Add(this.ai);
this.aj = new y(this.ai);
this.az.Add(this.aj);
this.ak = new cRechargeManager();
this.az.Add(this.ak);
this.al = new q();
this.az.Add(this.al);
this.am = new fr();
this.az.Add(this.am);
this.an = new ei(this.g, this.p);
this.az.Add(this.an);
this.ao = new ca(this.x, this.an);
this.az.Add(this.ao);
this.ap = new cr(this.ay);
this.az.Add(this.ap);
this.aq = new bp();
this.az.Add(this.aq);
this.ar = new ay(this.p);
this.az.Add(this.ar);
this.@as = new h();
this.az.Add(this.@as);
this.at = new du();
this.az.Add(this.at);
this.au = new ac();
this.az.Add(this.au);
this.ag = new cc();
this.az.Add(this.ag);
}
void Start()
{
mov = GetComponent <AIMovement>();
SelectTarget = WanderSelect;
Behavior = Wander;
}
public void Run()
{
if (!isAcceptRun())
{
return;
}
if (nSeqNo != nPreSeqNo)
{
resetCmd();
}
nPreSeqNo = nSeqNo;
CaseVTM seqCase = (CaseVTM)nSeqNo;
alwaysCheck();
RUN_MODE RunMode = RecipeMgr.Inst.TempRcp.eRunMode; //현재 레시피
if (RunMode == RUN_MODE.ONLY_LAMI)
{
//현재 진행 모드가 라미 모드일 경우 진행하지 않기 위함
return;
}
switch (seqCase)
{
case CaseVTM.Initialze:
break;
case CaseVTM.Check_Interlock:
break;
case CaseVTM.Check_Status:
//웨이퍼 로딩 상태 확인
ReqStatus = CheckStatusReqeust();
if (ReqStatus == ReqStatus_VTM.LOADLOCK_LOAD)
{
//Pickup Loadlock
Working_Arm = ARM.UPPER;
nextSeq(CaseVTM.Check_LL_Pickup);
}
else if (ReqStatus == ReqStatus_VTM.LOAD_PMC)
{
//Load PMC Seq
Working_Arm = ARM.UPPER;
nextSeq(CaseVTM.Start_VTM_Load_PMC);
}
else if (ReqStatus == ReqStatus_VTM.UNLOAD_PMC)
{
//Unload Seq
Working_Arm = ARM.LOWER;
nextSeq(CaseVTM.Start_VTM_Unload_PMC);
}
else if (ReqStatus == ReqStatus_VTM.UNLOAD_BONDED)
{
Working_Arm = ARM.LOWER;
nextSeq(CaseVTM.Check_LL_Place);
}
else
{
//요청이 없을 경우 대기하자
}
return;
/////////////////////////////////
//VTM Pickup LL -> Load PMC
/////////////////////////////////
case CaseVTM.Check_WaferStatus:
break;
case CaseVTM.Check_LL_Pickup:
//Loadlock이 동작 중인지 확인
if (GlobalVariable.interlock.bLLMoving)
{
return;
}
GlobalVariable.interlock.bLLMoving = true;
break;
case CaseVTM.Move_LL_Move_Pickup:
//Pickup LL
//GlobalSeq.autoRun.procLoadlock.Move(MotionPos.Pos3);
GlobalSeq.autoRun.procLoadlock.MoveExit((int)MotionPos.Pos3);
strLog = string.Format("Loadlock VTM Pickup Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Compl_LL_Move_Pickup:
if (GlobalSeq.autoRun.procLoadlock.CheckMoveDone((int)MotionPos.Pos3) == false)
{
return;
}
strLog = string.Format("Loadlock VTM Pickup Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Start_VTM_Pickup_LL:
break;
case CaseVTM.Set_Pumping_Pickup_LL:
GlobalSeq.autoRun.prcVTM.Pmc.GetStatus(CTC_STATUS.CTCRunMode, ref status);
if (status == (short)CTC_RunMode.ModeAtm)
{
break;
}
//Loadlock Pumping 상태로 만든다.
fRet = GlobalSeq.autoRun.procLoadlock.Loadlock_Pumping();
if (fRet == fn.success)
{
break;
}
else if (fRet == fn.busy)
{
return;
}
else
{
//Error
return;
}
case CaseVTM.Door_Open_Pickup_LL:
//VTM Door Open
GlobalVariable.io.VTM_Door_Open();
break;
case CaseVTM.Check_Open_Pickup_LL:
//VTM Door Open Check
if (GlobalVariable.io.Check_VTM_Door_Open() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.Move_VTM_Pickup_LL:
Working_Stage = VtmStage.LL;
Working_Arm = ARM.UPPER;
//VTM Pickup/Place 시 부분동작으로 변경 함
if (GlobalSeq.autoRun.procLoadlock.SetBlock() == false)
{
return;
}
MoveRobot(Working_Stage, Working_Arm, true); //Arm Fold 이동
//MoveRobot(Working_Stage, Working_Arm, false); //Arm Fold 이동
strLog = string.Format("VTM Robot Pickup Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Move_VTM_Pickup_LL_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Pickup_LL_Stretch:
//if (CheckComplete() != fn.success) return;
MoveRobot_Stretch(Working_Stage, Working_Arm, UPDOWN_POS.DOWN);
break;
case CaseVTM.Move_VTM_Pickup_LL_Stretch_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Pickup_LL_HandUp:
MoveRobot_HandUp(Working_Stage, Working_Arm);
break;
case CaseVTM.Move_VTM_Pickup_LL_HandUp_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Pickup_LL_Fold:
MoveRobot_Fold(Working_Stage, Working_Arm, UPDOWN_POS.UP);
break;
case CaseVTM.Move_VTM_Pickup_LL_Fold_Check:
if (CheckComplete() != fn.success)
{
return;
}
GlobalSeq.autoRun.procLoadlock.UnBlock();
break;
case CaseVTM.Compl_VTM_Pickup_LL:
strLog = string.Format("VTM Robot Pickup Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Door_Close_Pickup_LL:
//VTM Door Close
GlobalVariable.io.VTM_Door_Close();
break;
case CaseVTM.Check_Close_Pickup_LL:
//VTM Door Close Check
if (GlobalVariable.io.Check_VTM_Door_Close() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.End_VTM_Pickup_LL:
GlobalVariable.seqShared.LoadingLoadLockToVtm(WaferType.CARRIER, (HAND)Working_Arm);
//GlobalVariable.seqShared.LoadingLoadLockToVtm(WaferType.DEVICE, (HAND)Working_Arm);
GlobalVariable.interlock.bLLMoving = false;
GlobalVariable.interlock.bLLUsed_VTM = false; //Loadlock 사용 해제 Flag
//Loadlock 픽업 후 리턴
nextSeq(CaseVTM.Check_Interlock);
break;
/////////////////////////////////
//VTM Load PMC
/////////////////////////////////
case CaseVTM.Start_VTM_Load_PMC:
strLog = string.Format("VTM PMC Load Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Set_Pumping_Load_PMC:
GlobalSeq.autoRun.prcVTM.Pmc.GetStatus(CTC_STATUS.CTCRunMode, ref status);
if (status == (short)CTC_RunMode.ModeAtm)
{
break;
}
//PMC에 Vacuum 상태를 확인한다.
fRet = GlobalSeq.autoRun.procLoadlock.VTM_Pumping();
if (fRet == fn.success)
{
break;
}
else if (fRet == fn.busy)
{
return;
}
else
{
//Error
return;
}
////Convectron Sensor On Check
//if (GlobalVariable.io.ReadInput(GlobalVariable.io.I_VacuumTm_ConvectronRy_1) == true
// && GlobalVariable.io.ReadInput(GlobalVariable.io.I_VacuumTm_ConvectronRy_2) == true)
//{
// //조건이 맞으면 다음 케이스로 넘긴다
// break;
//}
//else
//{
// //Error
// return;
//}
case CaseVTM.Door_Open_Load_PMC:
//PMC Door Open
GlobalVariable.io.BD_Door_Open();
break;
case CaseVTM.Check_Open_Load_PMC:
//PMC Door Open Check
if (GlobalVariable.io.Check_BD_Door_Open() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.Move_VTM_Load_PMC:
if (Load_PMC(Working_Arm) != fn.success)
{
return;
}
break;
case CaseVTM.Compl_VTM_Load_PMC:
break;
case CaseVTM.Door_Close_Load_PMC:
//PMC Door Close
GlobalVariable.io.BD_Door_Close();
break;
case CaseVTM.Check_Close_Load_PMC:
//PMC Door Close Check
if (GlobalVariable.io.Check_BD_Door_Close() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.End_VTM_Load_PMC:
GlobalVariable.seqShared.LoadingVtmToBonder((HAND)Working_Arm);
strLog = string.Format("VTM PMC Load Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Set_Recipe:
break;
case CaseVTM.Start_Process:
//Set Process Start
GlobalVariable.interlock.bBondingProcess = true;
strLog = string.Format("Pmc Process On -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
nextSeq(CaseVTM.Check_Interlock);
return;
/////////////////////////////////
//VTM Unload PMC
/////////////////////////////////
case CaseVTM.Start_VTM_Unload_PMC:
strLog = string.Format("VTM PMC Unload Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Set_Pumping_Unload_PMC:
GlobalSeq.autoRun.prcVTM.Pmc.GetStatus(CTC_STATUS.CTCRunMode, ref status);
if (status == (short)CTC_RunMode.ModeAtm)
{
break;
}
//PMC에 Vacuum 상태를 확인한다.
fRet = GlobalSeq.autoRun.procLoadlock.VTM_Pumping();
if (fRet == fn.success)
{
break;
}
else if (fRet == fn.busy)
{
return;
}
else
{
//Error
return;
}
case CaseVTM.Door_Open_Unload_PMC:
//PMC Door Open
GlobalVariable.io.BD_Door_Open();
break;
case CaseVTM.Check_Open_Unload_PMC:
//PMC Door Open Check
if (GlobalVariable.io.Check_BD_Door_Open() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.Move_VTM_Unload_PMC:
Working_Arm = ARM.LOWER; //언로드 시 Lower Hand
if (Unload_PMC(Working_Arm) != fn.success)
{
return;
}
strLog = string.Format("VTM PMC Unload Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Compl_VTM_Unload_PMC:
break;
case CaseVTM.Door_Close_Unload_PMC:
//Door Close
GlobalVariable.io.BD_Door_Close();
break;
case CaseVTM.Check_Close_Unload_PMC:
//Door Close Check
if (GlobalVariable.io.Check_BD_Door_Close() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.End_VTM_Unload_PMC:
//데이터 이동
GlobalVariable.seqShared.LoadingBonderToVtm((HAND)Working_Arm);
nextSeq(CaseVTM.Check_Interlock);
return;
case CaseVTM.Check_LL_Place:
//Loadlock이 동작 중인지 확인
if (GlobalVariable.interlock.bLLMoving)
{
return;
}
GlobalVariable.interlock.bLLMoving = true;
GlobalVariable.interlock.bLLUsed_VTM = true; //Loadlock 사용 Flag
break;
case CaseVTM.Move_LL_Move_Place:
//BD Place -> Unload
//GlobalSeq.autoRun.procLoadlock.Move(MotionPos.Pos1);
GlobalSeq.autoRun.procLoadlock.MoveExit((int)MotionPos.Pos1);
strLog = string.Format("Loadlock VTM Place Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Compl_LL_Move_Place:
// if (GlobalSeq.autoRun.procLoadlock.CheckComplete() != fn.success) return;
if (GlobalSeq.autoRun.procLoadlock.CheckMoveDone((int)MotionPos.Pos1) == false)
{
return;
}
strLog = string.Format("Loadlock VTM Place Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Start_VTM_Place_LL:
if (Working_Arm != ARM.LOWER)
{
//Hand Fail
return;
}
break;
case CaseVTM.Set_Pumping_Place_LL:
GlobalSeq.autoRun.prcVTM.Pmc.GetStatus(CTC_STATUS.CTCRunMode, ref status);
if (status == (short)CTC_RunMode.ModeAtm)
{
break;
}
//Loadlock Pumping 상태로 만든다.
fRet = GlobalSeq.autoRun.procLoadlock.Loadlock_Pumping();
if (fRet == fn.success)
{
break;
}
else if (fRet == fn.busy)
{
return;
}
else
{
//Error
return;
}
case CaseVTM.Door_Open_Place_LL:
//VTM Door Open
GlobalVariable.io.VTM_Door_Open();
break;
case CaseVTM.Check_Open_Place_LL:
//VTM Door Open Check
if (GlobalVariable.io.Check_VTM_Door_Open() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.Move_VTM_Place_LL:
Working_Stage = VtmStage.Bonded;
if (GlobalSeq.autoRun.procLoadlock.SetBlock() == false)
{
return;
}
//MoveRobot(Working_Stage, Working_Arm, false);
MoveRobot(Working_Stage, Working_Arm, true); //Hand Fold 이동
strLog = string.Format("VTM Robot Place Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Move_VTM_Place_LL_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Place_LL_Stretch:
MoveRobot_Stretch(Working_Stage, Working_Arm, UPDOWN_POS.UP);
break;
case CaseVTM.Move_VTM_Place_LL_Stretch_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Place_LL_HandDown:
MoveRobot_HandDown(Working_Stage, Working_Arm);
break;
case CaseVTM.Move_VTM_Place_LL_HandDown_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Place_LL_Fold:
MoveRobot_Fold(Working_Stage, Working_Arm, UPDOWN_POS.DOWN);
break;
case CaseVTM.Move_VTM_Place_LL_Fold_Check:
if (CheckComplete() != fn.success)
{
return;
}
GlobalSeq.autoRun.procLoadlock.UnBlock();
break;
case CaseVTM.Compl_VTM_Place_LL:
strLog = string.Format("VTM Robot Place Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Door_Close_Place_LL:
//VTM Door Close
GlobalVariable.io.VTM_Door_Close();
break;
case CaseVTM.Check_Close_Place_LL:
//VTM Door Close Check
if (GlobalVariable.io.Check_VTM_Door_Close() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.End_VTM_Place_LL:
//데이터 이동
GlobalVariable.seqShared.LoadingVtmToLoadlock(WaferType.BONDED, (HAND)Working_Arm);
GlobalVariable.interlock.bLLMoving = false;
//본딩 완료 된 웨이퍼 LL에 언로딩 하고
//LL에 투입된 웨이퍼 있는지 확인
//있으면 Pickup 하자, Exchange
if (GlobalVariable.seqShared.IsInLoadLock((int)WaferType.DEVICE) == true &&
GlobalVariable.seqShared.IsInLoadLock((int)WaferType.CARRIER) == true &&
GlobalVariable.seqShared.IsInVTM(HAND.UPPER) == false)
{
//Pickup Loadlock
Working_Arm = ARM.UPPER;
nextSeq(CaseVTM.Check_LL_Pickup);
return;
}
else
{
//Loadlock 사용 해제
GlobalVariable.interlock.bLLUsed_VTM = false;
nextSeq(CaseVTM.Check_Interlock);
return;
}
return;
}
nSeqNo++;
}
static void test(fn f)
{
Console.WriteLine("{0}", f());
}
public void AddPath(string path, fn function)
{
call.Add(path, function);
}
ref libcall call = ref heap(new libcall(fn: fn, n: nargs, args: uintptr(unsafe.Pointer(&a1)), ), out ptr <libcall> _addr_call);
