public WaferData(EFEM_TYPE efType, WaferType wType, int nSlot)
{
this.efemType = efType;
this.waferType = wType;
this.nSlot = nSlot;
Init();
}
/// <summary>
/// EFEM의 슬롯에 Wafer가 있는지
/// </summary>
/// <param name="efType"></param>
/// <param name="nSlot"></param>
/// <returns></returns>
public bool IsInSlotEFEM(EFEM_TYPE efType, int nSlot)
{
WaferData[] wData = GetEfemData(efType);
if (wData[nSlot] == null)
{
return(false);
}
return(true);
}
private int TimeCoolingEnd; // 쿨링 끝
public WaferData()
{
efemType = EFEM_TYPE.A_CARRIER;
waferType = WaferType.CARRIER;
nSlot = 0;
bIsPreAlign = false;
bIsPostAlign = false;
bIsLami = false;
bIsBond = false;
bIsHP = false;
}
/// <summary>
/// EFEM에서 FM Robot으로 이동
/// </summary>
/// <param name="nSlot"></param>
public bool LoadingEfemToFm(EFEM_TYPE efType, int nSlot, HAND arm)
{
WaferData[] wData = GetEfemData(efType);
if (wData[nSlot] == null || robotFM[(int)arm] != null)
{
return(false);
}
robotFM[(int)arm] = wData[nSlot];
wData[nSlot] = null;
Save();
return(true);
}
/// <summary>
/// FM에서 EFEM으로 이동
/// </summary>
/// <param name="efType"></param>
/// <param name="nSlot"></param>
/// <returns></returns>
public bool LoadingFmToEfem(EFEM_TYPE efType, int nSlot, HAND arm)
{
WaferData[] wData = GetEfemData(efType);
if (robotFM[(int)arm] == null || wData[nSlot] != null)
{
return(false);
}
wData[nSlot] = robotFM[(int)arm];
robotFM[(int)arm] = null;
Save();
return(true);
}
WaferData[] GetEfemData(EFEM_TYPE efType)
{
switch (efType)
{
case EFEM_TYPE.A_CARRIER:
return(carrierArray1);
case EFEM_TYPE.B_CARRIER:
return(carrierArray2);
case EFEM_TYPE.C_DEVICE:
return(deviceArray1);
case EFEM_TYPE.D_DEVICE:
return(deviceArray2);
default:
System.Diagnostics.Debug.Fail("EFEM_TYPE이 이상함");
break;
}
return(null);
}
public void Run()
{
if (!isAcceptRun())
{
return;
}
if (nSeqNo != nPreSeqNo)
{
resetCmd();
}
nPreSeqNo = nSeqNo;
CaseFM seqCase = (CaseFM)nSeqNo;
//test
int nRetV = 0;
alwaysCheck();
switch (seqCase)
{
case CaseFM.Initialze:
break;
case CaseFM.Check_Interlock:
//임시 테스트, 웨이퍼 2장만 진행하기 위함
//if (nWaferCount >= 2) return;
//strLog = seqCase.ToString();
//AddMessage(strLog);
break;
case CaseFM.Start_LPM_Load:
if (bLPM_Load[(int)EFEM.LPMA] && bLPM_Load[(int)EFEM.LPMC])
{
//이미 LPM 로드 상태면 진행하지 않는다
nextSeq((int)CaseFM.Check_Status);
return;
}
break;
case CaseFM.Move_LPM_Load:
if (bLPM_Load[(int)EFEM.LPMA] == false)
{
//로드 전 Flag 초기화
LpmRoot.InitMappingFlag(EFEM.LPMA);
LoadLPM(EFEM.LPMA);
}
if (bLPM_Load[(int)EFEM.LPMC] == false)
{
LpmRoot.InitMappingFlag(EFEM.LPMC);
LoadLPM(EFEM.LPMC);
}
Thread.Sleep(500); //Load Delay
break;
case CaseFM.Compl_LPM_Load:
if (CheckLoad_LPM(EFEM.LPMA) != fn.success)
{
return;
}
break;
case CaseFM.End_LPM_Load:
if (CheckLoad_LPM(EFEM.LPMC) != fn.success)
{
return;
}
break;
case CaseFM.LPM_Mapping_Data:
//로드 시 Scan한 Map Data 연결
break;
case CaseFM.Check_Status_Load_A:
//Status를 체크 할 경우 LPM Alarm이 발생함,
//테스트 시 제거 후 진행 함
//LpmRoot.GetStatus(EFEM.LPMA);
break;
case CaseFM.Compl_Status_Load_A:
//if (CheckLoad_LPM(EFEM.LPMA) != fn.success) return;
break;
case CaseFM.End_Status_Load_A:
#if _REAL_MC
//LPM Load 후 Mapping Flag가 변경되면 완료
if (LpmRoot.GetMappingComplete(EFEM.LPMA) == false)
{
return;
}
if (LpmRoot.GetMappingComplete(EFEM.LPMC) == false)
{
return;
}
#endif
bLPM_Load[(int)EFEM.LPMA] = true;
bLPM_Load[(int)EFEM.LPMC] = true;
break;
case CaseFM.Check_Status:
RUN_MODE RunMode = RecipeMgr.Inst.TempRcp.eRunMode; //현재 레시피
if (RunMode == RUN_MODE.FULL || RunMode == RUN_MODE.ONLY_BOND)
{
//FULL Mode
if (nWaferCount % 2 == 0)
{
Working_LPM = EFEM.LPMA;
efemType = EFEM_TYPE.A_CARRIER;
}
else
{
Working_LPM = EFEM.LPMC;
efemType = EFEM_TYPE.C_DEVICE;
}
}
else if (RunMode == RUN_MODE.ONLY_LAMI)
{
//Only Lami 일경우 Carrier 고정 사용
Working_LPM = EFEM.LPMA;
efemType = EFEM_TYPE.A_CARRIER;
}
else
{
return;
}
//Next Wafer Slot 유/무 확인
GlobalVariable.WaferInfo.nWaferLoadSlot[(int)Working_LPM] = LpmRoot.GetNextWaferSlot(Working_LPM, LPMStatus.Load, COUNT.MAX_PORT_SLOT);
if (GlobalVariable.WaferInfo.nWaferLoadSlot[(int)Working_LPM] < 0)
{
//Wafer Empty
//더이상 투입할 웨이퍼가 없을경우 언로딩 시퀀스로 보낸다
nextSeq((int)CaseFM.Check_Unload_Wafer);
return;
}
break;
case CaseFM.Start_FM_Pickup_LPM:
//FM 로봇 상태 확인
//FM 로봇 웨이퍼 상태 확인
//웨이퍼 택타임 측정 시작 시간
if (Working_LPM == EFEM.LPMA)
{
GlobalVariable.seqShared.carrierArray1[GlobalVariable.WaferInfo.nWaferLoadSlot[(int)Working_LPM]].strTotalSt = DateTime.Now.ToString("hh:mm:ss.fff");
}
else if (Working_LPM == EFEM.LPMB)
{
GlobalVariable.seqShared.carrierArray2[GlobalVariable.WaferInfo.nWaferLoadSlot[(int)Working_LPM]].strTotalSt = DateTime.Now.ToString("hh:mm:ss.fff");
}
else if (Working_LPM == EFEM.LPMC)
{
GlobalVariable.seqShared.deviceArray1[GlobalVariable.WaferInfo.nWaferLoadSlot[(int)Working_LPM]].strTotalSt = DateTime.Now.ToString("hh:mm:ss.fff");
}
else if (Working_LPM == EFEM.LPMD)
{
GlobalVariable.seqShared.deviceArray2[GlobalVariable.WaferInfo.nWaferLoadSlot[(int)Working_LPM]].strTotalSt = DateTime.Now.ToString("hh:mm:ss.fff");
}
break;
case CaseFM.Move_FM_Pickup_LPM:
fmStatus = FMStatus.LPM_LOAD;
Working_Stage = (FMStage)Working_LPM + 1; //현재 LPM을 작업 할 Stage로 변경
nWorking_Slot = GlobalVariable.WaferInfo.nWaferLoadSlot[(int)Working_LPM] + 1; //현재 작업할 Wafer Slot
Working_Arm = ARM.UPPER;
MoveFmRobot(Working_Stage, nWorking_Slot, Working_Arm, fmStatus);
strLog = string.Format("FmRobot Pickup Move Start -> {0}, {1}, {2}", Working_Stage.ToString(), nWorking_Slot, Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseFM.Compl_FM_Pickup_LPM:
if (CheckCompl_FM() != fn.success)
{
return;
}
//nRetV = CheckCompl_FM();
//f(nRetV == err )
strLog = string.Format("FmRobot Pickup Move End -> {0}, {1}, {2}", Working_Stage.ToString(), nWorking_Slot, Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseFM.End_FM_Pickup_LPM:
GlobalSeq.autoRun.prcFM.LpmRoot.SetWaferInfo(Working_LPM, nWorking_Slot - 1, false); //웨이퍼 맵핑 데이터 갱신
GlobalVariable.seqShared.LoadingEfemToFm(efemType, nWorking_Slot - 1, (HAND)Working_Arm);
nWaferCount++;
break;
case CaseFM.Waiting_AL:
if (GlobalVariable.seqShared.IsInAligner() ||
GlobalVariable.interlock.bAlignMoving == true)
{
//Alinger에 Wafer가 아직 있으면 대기 하도록 하자
return;
}
break;
case CaseFM.Start_FM_Place_AL:
break;
case CaseFM.Move_FM_Place_AL:
fmStatus = FMStatus.BUFFER_LOAD;
Working_Stage = FMStage.AL;
nWorking_Slot = 1;
Working_Arm = ARM.UPPER;
MoveFmRobot(Working_Stage, nWorking_Slot, Working_Arm, fmStatus);
strLog = string.Format("FmRobot Place Move Start -> {0}, {1}, {2}", Working_Stage.ToString(), nWorking_Slot, Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseFM.Compl_FM_Place_AL:
if (CheckCompl_FM() != fn.success)
{
return;
}
strLog = string.Format("FmRobot Place Move End -> {0}, {1}, {2}", Working_Stage.ToString(), nWorking_Slot, Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseFM.End_FM_Place_AL:
GlobalVariable.seqShared.LoadingFmToAligner((HAND)Working_Arm);
GlobalVariable.interlock.bAlignMoving = true; //얼라인 동작
break;
case CaseFM.Check_Unload_Wafer:
//CP에 언로드 할 웨이퍼가 있는지 확인
if (GlobalVariable.seqShared.IsInCP(0) == false)
{
nextSeq((int)CaseFM.Initialze);
return;
}
break;
//////////////////////////////////////
//Wafer Unload
/////////////////////////////////////
case CaseFM.Start_FM_Pickup_CP:
//CP 웨이퍼 감지 센서 확인 필요!
break;
case CaseFM.Move_FM_Pickup_CP:
fmStatus = FMStatus.BUFFER_UNLOAD;
Working_Stage = FMStage.CP1;
nWorking_Slot = 1;
Working_Arm = ARM.LOWER; //CP에서 언로딩 시에는 LOW ARM 사용하자
MoveFmRobot(Working_Stage, nWorking_Slot, Working_Arm, fmStatus);
strLog = string.Format("FmRobot Pickup Move Start -> {0}, {1}, {2}", Working_Stage.ToString(), nWorking_Slot, Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseFM.Compl_FM_Pickup_CP:
if (CheckCompl_FM() != fn.success)
{
return;
}
strLog = string.Format("FmRobot Pickup Move End -> {0}, {1}, {2}", Working_Stage.ToString(), nWorking_Slot, Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseFM.End_FM_Pickup_cp:
GlobalVariable.seqShared.LoadingCpToFm(0, (HAND)Working_Arm);
break;
case CaseFM.Start_FM_Place_LPM:
//완료 웨이퍼 언로딩 시 LPM A부터 채워넣자
Working_LPM = EFEM.LPMA;
//LPM 상태를 확인하자
if (CheckLoad_LPM(Working_LPM) != fn.success)
{
//로드 상태가 아니면 에러
return;
}
//Unload Slot Check
//Next Wafer Slot 유/무 확인
GlobalVariable.WaferInfo.nWaferUnloadSlot[(int)Working_LPM] = LpmRoot.GetNextWaferSlot(Working_LPM, LPMStatus.Unload, COUNT.MAX_PORT_SLOT);
if (GlobalVariable.WaferInfo.nWaferUnloadSlot[(int)Working_LPM] < 0)
{
//Wafer Empty
return;
}
break;
case CaseFM.Move_FM_Place_LPM:
fmStatus = FMStatus.LPM_UNLOAD;
Working_Stage = (FMStage)Working_LPM + 1;
nWorking_Slot = GlobalVariable.WaferInfo.nWaferUnloadSlot[(int)Working_LPM] + 1; //현재 작업할 Wafer Slot
Working_Arm = ARM.LOWER; //CP에서 언로딩 시에는 LOW ARM 사용하자
MoveFmRobot(Working_Stage, nWorking_Slot, Working_Arm, fmStatus);
strLog = string.Format("FmRobot Place Move Start -> {0}, {1}, {2}", Working_Stage.ToString(), nWorking_Slot, Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseFM.Compl_FM_Place_LPM:
if (CheckCompl_FM() != fn.success)
{
return;
}
strLog = string.Format("FmRobot Place Move End -> {0}, {1}, {2}", Working_Stage.ToString(), nWorking_Slot, Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseFM.End_FM_Place_LPM:
GlobalVariable.seqShared.LoadingFmToEfem(EFEM_TYPE.A_CARRIER, nWorking_Slot - 1, (HAND)Working_Arm);
//Wafer Unload 후 Data 변경
GlobalSeq.autoRun.prcFM.LpmRoot.SetUnloadSlot(Working_LPM, nWorking_Slot - 1, true);
if (Working_LPM == EFEM.LPMA)
{
GlobalVariable.seqShared.carrierArray1[GlobalVariable.WaferInfo.nWaferUnloadSlot[(int)Working_LPM]].strTotalEnd = DateTime.Now.ToString("hh:mm:ss.fff");
}
else if (Working_LPM == EFEM.LPMB)
{
GlobalVariable.seqShared.carrierArray2[GlobalVariable.WaferInfo.nWaferUnloadSlot[(int)Working_LPM]].strTotalEnd = DateTime.Now.ToString("hh:mm:ss.fff");
}
else if (Working_LPM == EFEM.LPMC)
{
GlobalVariable.seqShared.deviceArray1[GlobalVariable.WaferInfo.nWaferUnloadSlot[(int)Working_LPM]].strTotalEnd = DateTime.Now.ToString("hh:mm:ss.fff");
}
else if (Working_LPM == EFEM.LPMD)
{
GlobalVariable.seqShared.deviceArray2[GlobalVariable.WaferInfo.nWaferUnloadSlot[(int)Working_LPM]].strTotalEnd = DateTime.Now.ToString("hh:mm:ss.fff");
}
nextSeq((int)CaseFM.Initialze);
return;
///////////////////////////////////
//LPM Unload
//////////////////////////////////
case CaseFM.Start_LPM_Unload:
break;
case CaseFM.Move_LPM_Unload:
UnloadLPM(Working_LPM);
break;
case CaseFM.Check_Status_Unload:
LpmRoot.GetStatus(Working_LPM);
break;
case CaseFM.Compl_LPM_Unload:
if (CheckUnload_LPM(Working_LPM) != fn.success)
{
return;
}
break;
case CaseFM.End_LPM_Unload:
//처음 case로
nextSeq((int)CaseFM.Initialze);
return;
}
nSeqNo++;
}
