public void MoveRobot(VtmStage stage, ARM _Arm, bool bHandFold = false)
{
int nSlot = 1;
if (bHandFold == true)
{
VtmRobot.MoveStage((int)stage, nSlot, _Arm, RADIAL_POS.RETRACTED, UPDOWN_POS.DOWN);
}
else
{
if (stage == VtmStage.LL || stage == VtmStage.PMC1_ULD)
{
VtmRobot.MovePickup((int)stage, nSlot, _Arm);
}
else
{
VtmRobot.MovePlace((int)stage, nSlot, _Arm);
Debug.WriteLine("ProcVTM.cs MoveRobot Stage=" + stage.ToString() + ", nSlot=" + nSlot.ToString() + ", arm=" + _Arm.ToString());
}
}
}
public void MoveRobot_HandDown(VtmStage stage, ARM _Arm)
{
int nSlot = 1;
VtmRobot.MoveZAxisDown((int)stage, nSlot, _Arm);
}
public void MoveRobot_Stretch(VtmStage stage, ARM _Arm, UPDOWN_POS _UpDnPos)
{
int nSlot = 1;
VtmRobot.MoveExtend((int)stage, nSlot, _Arm, _UpDnPos);
}
public void MoveRobot_Fold(VtmStage stage, ARM _Arm, UPDOWN_POS _UpDnPos)
{
int nSlot = 1;
VtmRobot.MoveRetract((int)stage, nSlot, _Arm, _UpDnPos);
}
public void Run()
{
if (!isAcceptRun())
{
return;
}
if (nSeqNo != nPreSeqNo)
{
resetCmd();
}
nPreSeqNo = nSeqNo;
CaseVTM seqCase = (CaseVTM)nSeqNo;
alwaysCheck();
RUN_MODE RunMode = RecipeMgr.Inst.TempRcp.eRunMode; //현재 레시피
if (RunMode == RUN_MODE.ONLY_LAMI)
{
//현재 진행 모드가 라미 모드일 경우 진행하지 않기 위함
return;
}
switch (seqCase)
{
case CaseVTM.Initialze:
break;
case CaseVTM.Check_Interlock:
break;
case CaseVTM.Check_Status:
//웨이퍼 로딩 상태 확인
ReqStatus = CheckStatusReqeust();
if (ReqStatus == ReqStatus_VTM.LOADLOCK_LOAD)
{
//Pickup Loadlock
Working_Arm = ARM.UPPER;
nextSeq(CaseVTM.Check_LL_Pickup);
}
else if (ReqStatus == ReqStatus_VTM.LOAD_PMC)
{
//Load PMC Seq
Working_Arm = ARM.UPPER;
nextSeq(CaseVTM.Start_VTM_Load_PMC);
}
else if (ReqStatus == ReqStatus_VTM.UNLOAD_PMC)
{
//Unload Seq
Working_Arm = ARM.LOWER;
nextSeq(CaseVTM.Start_VTM_Unload_PMC);
}
else if (ReqStatus == ReqStatus_VTM.UNLOAD_BONDED)
{
Working_Arm = ARM.LOWER;
nextSeq(CaseVTM.Check_LL_Place);
}
else
{
//요청이 없을 경우 대기하자
}
return;
/////////////////////////////////
//VTM Pickup LL -> Load PMC
/////////////////////////////////
case CaseVTM.Check_WaferStatus:
break;
case CaseVTM.Check_LL_Pickup:
//Loadlock이 동작 중인지 확인
if (GlobalVariable.interlock.bLLMoving)
{
return;
}
GlobalVariable.interlock.bLLMoving = true;
break;
case CaseVTM.Move_LL_Move_Pickup:
//Pickup LL
//GlobalSeq.autoRun.procLoadlock.Move(MotionPos.Pos3);
GlobalSeq.autoRun.procLoadlock.MoveExit((int)MotionPos.Pos3);
strLog = string.Format("Loadlock VTM Pickup Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Compl_LL_Move_Pickup:
if (GlobalSeq.autoRun.procLoadlock.CheckMoveDone((int)MotionPos.Pos3) == false)
{
return;
}
strLog = string.Format("Loadlock VTM Pickup Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Start_VTM_Pickup_LL:
break;
case CaseVTM.Set_Pumping_Pickup_LL:
GlobalSeq.autoRun.prcVTM.Pmc.GetStatus(CTC_STATUS.CTCRunMode, ref status);
if (status == (short)CTC_RunMode.ModeAtm)
{
break;
}
//Loadlock Pumping 상태로 만든다.
fRet = GlobalSeq.autoRun.procLoadlock.Loadlock_Pumping();
if (fRet == fn.success)
{
break;
}
else if (fRet == fn.busy)
{
return;
}
else
{
//Error
return;
}
case CaseVTM.Door_Open_Pickup_LL:
//VTM Door Open
GlobalVariable.io.VTM_Door_Open();
break;
case CaseVTM.Check_Open_Pickup_LL:
//VTM Door Open Check
if (GlobalVariable.io.Check_VTM_Door_Open() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.Move_VTM_Pickup_LL:
Working_Stage = VtmStage.LL;
Working_Arm = ARM.UPPER;
//VTM Pickup/Place 시 부분동작으로 변경 함
if (GlobalSeq.autoRun.procLoadlock.SetBlock() == false)
{
return;
}
MoveRobot(Working_Stage, Working_Arm, true); //Arm Fold 이동
//MoveRobot(Working_Stage, Working_Arm, false); //Arm Fold 이동
strLog = string.Format("VTM Robot Pickup Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Move_VTM_Pickup_LL_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Pickup_LL_Stretch:
//if (CheckComplete() != fn.success) return;
MoveRobot_Stretch(Working_Stage, Working_Arm, UPDOWN_POS.DOWN);
break;
case CaseVTM.Move_VTM_Pickup_LL_Stretch_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Pickup_LL_HandUp:
MoveRobot_HandUp(Working_Stage, Working_Arm);
break;
case CaseVTM.Move_VTM_Pickup_LL_HandUp_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Pickup_LL_Fold:
MoveRobot_Fold(Working_Stage, Working_Arm, UPDOWN_POS.UP);
break;
case CaseVTM.Move_VTM_Pickup_LL_Fold_Check:
if (CheckComplete() != fn.success)
{
return;
}
GlobalSeq.autoRun.procLoadlock.UnBlock();
break;
case CaseVTM.Compl_VTM_Pickup_LL:
strLog = string.Format("VTM Robot Pickup Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Door_Close_Pickup_LL:
//VTM Door Close
GlobalVariable.io.VTM_Door_Close();
break;
case CaseVTM.Check_Close_Pickup_LL:
//VTM Door Close Check
if (GlobalVariable.io.Check_VTM_Door_Close() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.End_VTM_Pickup_LL:
GlobalVariable.seqShared.LoadingLoadLockToVtm(WaferType.CARRIER, (HAND)Working_Arm);
//GlobalVariable.seqShared.LoadingLoadLockToVtm(WaferType.DEVICE, (HAND)Working_Arm);
GlobalVariable.interlock.bLLMoving = false;
GlobalVariable.interlock.bLLUsed_VTM = false; //Loadlock 사용 해제 Flag
//Loadlock 픽업 후 리턴
nextSeq(CaseVTM.Check_Interlock);
break;
/////////////////////////////////
//VTM Load PMC
/////////////////////////////////
case CaseVTM.Start_VTM_Load_PMC:
strLog = string.Format("VTM PMC Load Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Set_Pumping_Load_PMC:
GlobalSeq.autoRun.prcVTM.Pmc.GetStatus(CTC_STATUS.CTCRunMode, ref status);
if (status == (short)CTC_RunMode.ModeAtm)
{
break;
}
//PMC에 Vacuum 상태를 확인한다.
fRet = GlobalSeq.autoRun.procLoadlock.VTM_Pumping();
if (fRet == fn.success)
{
break;
}
else if (fRet == fn.busy)
{
return;
}
else
{
//Error
return;
}
////Convectron Sensor On Check
//if (GlobalVariable.io.ReadInput(GlobalVariable.io.I_VacuumTm_ConvectronRy_1) == true
// && GlobalVariable.io.ReadInput(GlobalVariable.io.I_VacuumTm_ConvectronRy_2) == true)
//{
// //조건이 맞으면 다음 케이스로 넘긴다
// break;
//}
//else
//{
// //Error
// return;
//}
case CaseVTM.Door_Open_Load_PMC:
//PMC Door Open
GlobalVariable.io.BD_Door_Open();
break;
case CaseVTM.Check_Open_Load_PMC:
//PMC Door Open Check
if (GlobalVariable.io.Check_BD_Door_Open() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.Move_VTM_Load_PMC:
if (Load_PMC(Working_Arm) != fn.success)
{
return;
}
break;
case CaseVTM.Compl_VTM_Load_PMC:
break;
case CaseVTM.Door_Close_Load_PMC:
//PMC Door Close
GlobalVariable.io.BD_Door_Close();
break;
case CaseVTM.Check_Close_Load_PMC:
//PMC Door Close Check
if (GlobalVariable.io.Check_BD_Door_Close() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.End_VTM_Load_PMC:
GlobalVariable.seqShared.LoadingVtmToBonder((HAND)Working_Arm);
strLog = string.Format("VTM PMC Load Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Set_Recipe:
break;
case CaseVTM.Start_Process:
//Set Process Start
GlobalVariable.interlock.bBondingProcess = true;
strLog = string.Format("Pmc Process On -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
nextSeq(CaseVTM.Check_Interlock);
return;
/////////////////////////////////
//VTM Unload PMC
/////////////////////////////////
case CaseVTM.Start_VTM_Unload_PMC:
strLog = string.Format("VTM PMC Unload Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Set_Pumping_Unload_PMC:
GlobalSeq.autoRun.prcVTM.Pmc.GetStatus(CTC_STATUS.CTCRunMode, ref status);
if (status == (short)CTC_RunMode.ModeAtm)
{
break;
}
//PMC에 Vacuum 상태를 확인한다.
fRet = GlobalSeq.autoRun.procLoadlock.VTM_Pumping();
if (fRet == fn.success)
{
break;
}
else if (fRet == fn.busy)
{
return;
}
else
{
//Error
return;
}
case CaseVTM.Door_Open_Unload_PMC:
//PMC Door Open
GlobalVariable.io.BD_Door_Open();
break;
case CaseVTM.Check_Open_Unload_PMC:
//PMC Door Open Check
if (GlobalVariable.io.Check_BD_Door_Open() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.Move_VTM_Unload_PMC:
Working_Arm = ARM.LOWER; //언로드 시 Lower Hand
if (Unload_PMC(Working_Arm) != fn.success)
{
return;
}
strLog = string.Format("VTM PMC Unload Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Compl_VTM_Unload_PMC:
break;
case CaseVTM.Door_Close_Unload_PMC:
//Door Close
GlobalVariable.io.BD_Door_Close();
break;
case CaseVTM.Check_Close_Unload_PMC:
//Door Close Check
if (GlobalVariable.io.Check_BD_Door_Close() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.End_VTM_Unload_PMC:
//데이터 이동
GlobalVariable.seqShared.LoadingBonderToVtm((HAND)Working_Arm);
nextSeq(CaseVTM.Check_Interlock);
return;
case CaseVTM.Check_LL_Place:
//Loadlock이 동작 중인지 확인
if (GlobalVariable.interlock.bLLMoving)
{
return;
}
GlobalVariable.interlock.bLLMoving = true;
GlobalVariable.interlock.bLLUsed_VTM = true; //Loadlock 사용 Flag
break;
case CaseVTM.Move_LL_Move_Place:
//BD Place -> Unload
//GlobalSeq.autoRun.procLoadlock.Move(MotionPos.Pos1);
GlobalSeq.autoRun.procLoadlock.MoveExit((int)MotionPos.Pos1);
strLog = string.Format("Loadlock VTM Place Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Compl_LL_Move_Place:
// if (GlobalSeq.autoRun.procLoadlock.CheckComplete() != fn.success) return;
if (GlobalSeq.autoRun.procLoadlock.CheckMoveDone((int)MotionPos.Pos1) == false)
{
return;
}
strLog = string.Format("Loadlock VTM Place Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Start_VTM_Place_LL:
if (Working_Arm != ARM.LOWER)
{
//Hand Fail
return;
}
break;
case CaseVTM.Set_Pumping_Place_LL:
GlobalSeq.autoRun.prcVTM.Pmc.GetStatus(CTC_STATUS.CTCRunMode, ref status);
if (status == (short)CTC_RunMode.ModeAtm)
{
break;
}
//Loadlock Pumping 상태로 만든다.
fRet = GlobalSeq.autoRun.procLoadlock.Loadlock_Pumping();
if (fRet == fn.success)
{
break;
}
else if (fRet == fn.busy)
{
return;
}
else
{
//Error
return;
}
case CaseVTM.Door_Open_Place_LL:
//VTM Door Open
GlobalVariable.io.VTM_Door_Open();
break;
case CaseVTM.Check_Open_Place_LL:
//VTM Door Open Check
if (GlobalVariable.io.Check_VTM_Door_Open() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.Move_VTM_Place_LL:
Working_Stage = VtmStage.Bonded;
if (GlobalSeq.autoRun.procLoadlock.SetBlock() == false)
{
return;
}
//MoveRobot(Working_Stage, Working_Arm, false);
MoveRobot(Working_Stage, Working_Arm, true); //Hand Fold 이동
strLog = string.Format("VTM Robot Place Move Start -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Move_VTM_Place_LL_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Place_LL_Stretch:
MoveRobot_Stretch(Working_Stage, Working_Arm, UPDOWN_POS.UP);
break;
case CaseVTM.Move_VTM_Place_LL_Stretch_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Place_LL_HandDown:
MoveRobot_HandDown(Working_Stage, Working_Arm);
break;
case CaseVTM.Move_VTM_Place_LL_HandDown_Check:
if (CheckComplete() != fn.success)
{
return;
}
break;
case CaseVTM.Move_VTM_Place_LL_Fold:
MoveRobot_Fold(Working_Stage, Working_Arm, UPDOWN_POS.DOWN);
break;
case CaseVTM.Move_VTM_Place_LL_Fold_Check:
if (CheckComplete() != fn.success)
{
return;
}
GlobalSeq.autoRun.procLoadlock.UnBlock();
break;
case CaseVTM.Compl_VTM_Place_LL:
strLog = string.Format("VTM Robot Place Move End -> {0}, {1}", Working_Stage.ToString(), Working_Arm.ToString());
AddMessage(strLog);
break;
case CaseVTM.Door_Close_Place_LL:
//VTM Door Close
GlobalVariable.io.VTM_Door_Close();
break;
case CaseVTM.Check_Close_Place_LL:
//VTM Door Close Check
if (GlobalVariable.io.Check_VTM_Door_Close() == false)
{
//타임아웃 체크
return;
}
break;
case CaseVTM.End_VTM_Place_LL:
//데이터 이동
GlobalVariable.seqShared.LoadingVtmToLoadlock(WaferType.BONDED, (HAND)Working_Arm);
GlobalVariable.interlock.bLLMoving = false;
//본딩 완료 된 웨이퍼 LL에 언로딩 하고
//LL에 투입된 웨이퍼 있는지 확인
//있으면 Pickup 하자, Exchange
if (GlobalVariable.seqShared.IsInLoadLock((int)WaferType.DEVICE) == true &&
GlobalVariable.seqShared.IsInLoadLock((int)WaferType.CARRIER) == true &&
GlobalVariable.seqShared.IsInVTM(HAND.UPPER) == false)
{
//Pickup Loadlock
Working_Arm = ARM.UPPER;
nextSeq(CaseVTM.Check_LL_Pickup);
return;
}
else
{
//Loadlock 사용 해제
GlobalVariable.interlock.bLLUsed_VTM = false;
nextSeq(CaseVTM.Check_Interlock);
return;
}
return;
}
nSeqNo++;
}
public fn VtmRobot_Place_Loadlock()
{
if (!isAcceptRun())
{
return(fn.busy);
}
nPreSeqNo = nSeqNo;
//VTM은 Up핸드로만 LL플레이스 고정
VtmRobot_Arm = CJ_Controls.Communication.QuadraVTM4.ARM.LOWER;
VtmStage stage = GlobalVariable.manualInfo.mnlStageVTM; //매뉴얼에서 선택한 Stage 연결
switch (nSeqNo)
{
case 0:
break;
case 10:
//BD Place -> Unload
//GlobalSeq.autoRun.procLoadlock.Move(MotionPos.Pos1);
GlobalSeq.autoRun.procLoadlock.MoveExit((int)MotionPos.Pos1);
break;
case 15:
//if (GlobalSeq.autoRun.procLoadlock.CheckComplete() != fn.success) return fn.busy;
if (GlobalSeq.autoRun.procLoadlock.CheckMoveDone((int)MotionPos.Pos1) == false)
{
return(fn.busy);
}
break;
case 20:
GlobalSeq.autoRun.prcVTM.MoveRobot(stage, VtmRobot_Arm);
break;
case 30:
if (GlobalSeq.autoRun.prcVTM.CheckComplete() != fn.success)
{
return(fn.busy);
}
break;
case 35:
GlobalSeq.autoRun.prcVTM.MoveRobot(stage, VtmRobot_Arm, true);
break;
case 40:
if (GlobalSeq.autoRun.prcVTM.CheckComplete() != fn.success)
{
return(fn.busy);
}
break;
case 50:
nSeqNo = 0;
return(fn.success);
}
//wrong seq check
if (nSeqNo > 10000)
{
//error occur
return(fn.err);
}
nSeqNo++;
return(fn.busy);
}