public void TestMethod1()//OK
{
try
{
using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real"))
{
halContext.MvaCfBootup();
halContext.MvaCfLoad();
var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp;
var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer;
unv.HalConnect();//需要先將MacHalUniversal建立連線，各Assembly的Hal建立連線時，才能讓PLC的連線成功
mt.HalConnect();
//1. Mask Robot (無夾持光罩) 從Home點移動至Load Port B
mt.RobotMoving(true);
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
mt.RobotMoving(false);
}
}
catch (Exception ex) { throw ex; }
}
public void TestMethod1()//OK
{
try
{
using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real"))
{
halContext.MvaCfBootup();
halContext.MvaCfLoad();
var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp;
var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer;
var lpb = halContext.HalDevices[EnumMacDeviceId.loadportB_assembly.ToString()] as MacHalLoadPort;
var lpa = halContext.HalDevices[EnumMacDeviceId.loadportA_assembly.ToString()] as MacHalLoadPort;
var ic = halContext.HalDevices[EnumMacDeviceId.inspectionch_assembly.ToString()] as MacHalInspectionCh;
unv.HalConnect();//需要先將MacHalUniversal建立連線，各Assembly的Hal建立連線時，才能讓PLC的連線成功
mt.HalConnect();
lpb.HalConnect();
lpa.HalConnect();
ic.HalConnect();
//1. 光罩放置於Load Port B POD內
//2~5 Load Poat B Dock
lpb.Dock();
//6. (編號7-CCD): 開啟光源 -> 拍照(FOV正確) -> 關閉光源
lpb.LightForLoadPortBSetValue(255);
lpb.Camera_LoadPortB_CapToSave("D:/Image/LP/LPB/Insp", "jpg");
lpb.LightForLoadPortBSetValue(0);
//7.Mask Robot從Home點移動至Load Port B
mt.RobotMoving(true);
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.RobotMoving(false);
//8. Mask Robot上的傾斜角度傳感器可報值 & 位於水平狀態
var Level = mt.ReadLevel();
//9. Mask Robot在Load Port B 進行光罩夾取
mt.Clamp(1);
//10. Mask Robot將光罩從Load Port B移動至Recognizer Chamber處
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToBarcodeReaderPathFile());
mt.RobotMoving(false);
//11. (編號8 - Barcode CCD)拍攝mask barcode, 並能成功辨識ID
lpa.LightForBarcodeReaderSetValue(2);
lpa.Camera_Barcode_CapToSave("D:/Image/LP/LPA/Barcode", "jpg");
lpa.LightForBarcodeReaderSetValue(0);
//12. Mask Robot將光罩從Recognizer移動至Inspection Chamber Entry處
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromBarcodeReaderToLPHomePathFile());
mt.ChangeDirection(pathFileObj.InspChHomePathFile());
ic.SetRobotIntrude(true);
mt.ExePathMove(pathFileObj.FromICHomeToICBackSidePathFile());
mt.ExePathMove(pathFileObj.FromICBackSideToICStagePathFile());
mt.RobotMoving(false);
//13. Mask Robot將光罩從Inspection Chamber Entry處, 移回Load Port B
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromICStageToICBackSidePathFile());
mt.ExePathMove(pathFileObj.FromICBackSideToICHomePathFile());
ic.SetRobotIntrude(false);
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.RobotMoving(false);
//14. Mask Robot將光罩放置於Load Port B POD內
mt.Unclamp();
//15. Mask Robot (無夾持光罩) 從Load Port B移回Home點
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
mt.RobotMoving(false);
//16. (編號7-CCD): 開啟光源 -> 拍照(FOV正確) -> 關閉光源
lpb.LightForLoadPortBSetValue(255);
lpb.Camera_LoadPortB_CapToSave("D:/Image/LP/LPB/Insp", "jpg");
lpb.LightForLoadPortBSetValue(0);
//17~20 Load Port B Undock
lpb.Undock();
}
}
catch (Exception ex) { throw ex; }
}
public void TestMethod2()//OK
{
try
{
using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real"))
{
halContext.MvaCfBootup();
halContext.MvaCfLoad();
var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp;
var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer;
var ic = halContext.HalDevices[EnumMacDeviceId.inspectionch_assembly.ToString()] as MacHalInspectionCh;
unv.HalConnect();//需要先將MacHalUniversal建立連線，各Assembly的Hal建立連線時，才能讓PLC的連線成功
mt.HalConnect();
ic.HalConnect();
ic.Initial();
//1. 光罩放置於Load Port A的Pod上
//2. Mask Robot從Home點移動至Load Port A
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile());
mt.RobotMoving(false);
//3.Mask Robot在Load Port A的Pod 內進行光罩夾取
mt.Clamp(1);
//4. Mask Robot將光罩從Load Port A移動至Inspection Chamber內 (不放置)
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile());
mt.ChangeDirection(pathFileObj.InspChHomePathFile());
ic.SetRobotIntrude(true);
mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile());
mt.RobotMoving(false);
//5. 雷射sensor可以偵測到Mask Robot進入Inspection Chamber & 報值
var About = ic.ReadRobotPosLeftRight();
var UpDown = ic.ReadRobotPosUpDown();
//6. Mask Robot將光罩從Inspection Chamber, 移回Load Port A
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile());
ic.SetRobotIntrude(false);
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile());
mt.RobotMoving(false);
//7. Mask Robot將光罩放置於Load Port A Pod上
mt.Unclamp();
//8. Mask Robot (無夾持光罩) 從Load Port A移回Home點
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile());
mt.RobotMoving(false);
About = 0;
UpDown = 0;
//9 重複1~8, 執行Load Port B->Inspection Chamber光罩傳送
//1. 光罩放置於Load Port B的Pod上
//2. Mask Robot從Home點移動至Load Port B
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.RobotMoving(false);
//3.Mask Robot在Load Port B的Pod 內進行光罩夾取
mt.Clamp(1);
//4. Mask Robot將光罩從Load Port B移動至Inspection Chamber內 (不放置)
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
mt.ChangeDirection(pathFileObj.InspChHomePathFile());
ic.SetRobotIntrude(true);
mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile());
mt.RobotMoving(false);
//5. 雷射sensor可以偵測到Mask Robot進入Inspection Chamber & 報值
About = ic.ReadRobotPosLeftRight();
UpDown = ic.ReadRobotPosUpDown();
//6. Mask Robot將光罩從Inspection Chamber, 移回Load Port B
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile());
ic.SetRobotIntrude(false);
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.RobotMoving(false);
//7. Mask Robot將光罩放置於Load Port B Pod上
mt.Unclamp();
//8. Mask Robot (無夾持光罩) 從Load Port B移回Home點
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
mt.RobotMoving(false);
}
}
catch (Exception ex) { throw ex; }
}
public void TestMethod1()//OK
{
try
{
using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real"))
{
halContext.MvaCfBootup();
halContext.MvaCfLoad();
var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp;
var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer;
var cc = halContext.HalDevices[EnumMacDeviceId.clean_assembly.ToString()] as MacHalCleanCh;
unv.HalConnect();//需要先將MacHalUniversal建立連線，各Assembly的Hal建立連線時，才能讓PLC的連線成功
mt.HalConnect();
cc.HalConnect();
//1. 光罩放置於Load Port A的Pod上
//2.Mask Robot從Home點移動至Load Port A
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile());
mt.RobotMoving(false);
//3. Mask Robot在Load Port A的Pod 內進行光罩夾取
mt.Clamp(1);
//4. Mask Robot將光罩從Load Port A移動至Clean Chamber內
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile());
mt.ChangeDirection(pathFileObj.CleanChHomePathFile());
mt.ExePathMove(pathFileObj.FromCCHomeToCCFrontSidePathFile());
mt.RobotMoving(false);
//5. 雷射sensor可以偵測到Mask Robot進入Clean Chamber & 報值
var About = cc.ReadRobotPosLeftRight();
var UpDown = cc.ReadRobotPosUpDown();
//6. Mask Robot模擬吹除轉動Mask行為
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromCCFrontSideToCleanPathFile());
mt.ExePathMove(pathFileObj.FromFrontSideCleanFinishToCCPathFile());
mt.ExePathMove(pathFileObj.FromCCFrontSideToCapturePathFile());
mt.ExePathMove(pathFileObj.FromFrontSideCaptureFinishToCCPathFile());
mt.RobotMoving(false);
//7. 將光罩移動至安全光柵附近, 觸發光柵報值(由人員手動遮斷)
var LightCurtain = cc.ReadLightCurtain();
//8. Mask Robot將光罩從Clean Chamber, 移回Load Port A
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromCCFrontSideToCCHomePathFile());
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile());
mt.RobotMoving(false);
//9. Mask Robot將光罩放置於Load Port A Pod上
mt.Unclamp();
//10. Mask Robot (無夾持光罩) 從Load Port A移回Home點
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile());
mt.RobotMoving(false);
About = 0;
UpDown = 0;
//11. 重複1~10, 執行Load Port B -> Clean Chamber光罩傳送
//1. 光罩放置於Load Port B的Pod上
//2.Mask Robot從Home點移動至Load Port B
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.RobotMoving(false);
//3. Mask Robot在Load Port B的Pod 內進行光罩夾取
mt.Clamp(1);
//4. Mask Robot將光罩從Load Port B移動至Clean Chamber內
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
mt.ChangeDirection(pathFileObj.CleanChHomePathFile());
mt.ExePathMove(pathFileObj.FromCCHomeToCCFrontSidePathFile());
mt.RobotMoving(false);
//5. 雷射sensor可以偵測到Mask Robot進入Clean Chamber & 報值
About = cc.ReadRobotPosLeftRight();
UpDown = cc.ReadRobotPosUpDown();
//6. Mask Robot模擬吹除轉動Mask行為
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromCCFrontSideToCleanPathFile());
mt.ExePathMove(pathFileObj.FromFrontSideCleanFinishToCCPathFile());
mt.ExePathMove(pathFileObj.FromCCFrontSideToCapturePathFile());
mt.ExePathMove(pathFileObj.FromFrontSideCaptureFinishToCCPathFile());
mt.RobotMoving(false);
//7. 將光罩移動至安全光柵附近, 觸發光柵報值(由人員手動遮斷)
LightCurtain = cc.ReadLightCurtain();
//8. Mask Robot將光罩從Clean Chamber, 移回Load Port B
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromCCFrontSideToCCHomePathFile());
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.RobotMoving(false);
//9. Mask Robot將光罩放置於Load Port B Pod上
mt.Unclamp();
//10. Mask Robot (無夾持光罩) 從Load Port B移回Home點
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
mt.RobotMoving(false);
}
}
catch (Exception ex) { throw ex; }
}
public void TestMethod1()//OK
{
try
{
using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real"))
{
halContext.MvaCfBootup();
halContext.MvaCfLoad();
var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp;
var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer;
var ic = halContext.HalDevices[EnumMacDeviceId.inspectionch_assembly.ToString()] as MacHalInspectionCh;
unv.HalConnect();//需要先將MacHalUniversal建立連線，各Assembly的Hal建立連線時，才能讓PLC的連線成功
mt.HalConnect();
ic.HalConnect();
ic.Initial();
//1. 光罩放置於Inspection Chamber Stage上
//2. (編號2-CCD): 開啟光源 -> 拍照(FOV正確) -> 關閉光源
ic.LightForBackLineSetValue(120);
ic.Camera_SideDfs_CapToSave("D:/Image/IC/SigeDfs", "jpg");
ic.LightForBackLineSetValue(0);
//3. (編號3-CCD): 開啟光源 -> 拍照(FOV正確) -> 關閉光源
ic.LightForLeftLineSetValue(255);
ic.LightForBackLineSetValue(255);
ic.LightForTopCrlDfsSetValue(39);
ic.Camera_TopDfs_CapToSave("D:/Image/IC/TopDfs", "jpg");
ic.LightForLeftLineSetValue(0);
ic.LightForBackLineSetValue(0);
ic.LightForTopCrlDfsSetValue(0);
//4. Mask Robot從Home點移動至Inspection Chamber
mt.RobotMoving(true);
mt.ChangeDirection(pathFileObj.InspChHomePathFile());
ic.SetRobotIntrude(true);
mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile());
mt.ExePathMove(pathFileObj.FromICFrontSideToICStagePathFile());
mt.RobotMoving(false);
//5. 雷射sensor可以偵測到Mask Robot進入Inspection Chamber &報值
var About = ic.ReadRobotPosLeftRight();
var UpDown = ic.ReadRobotPosUpDown();
//6. Mask Robot在Inspection Chamber 內進行光罩夾取
mt.Clamp(1);
//7. Mask Robot將光罩從Inspection Chamber移動至Load Port A/ B Entry處
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromICStageToICFrontSidePathFile());
mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile());
ic.SetRobotIntrude(false);
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile());
mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.RobotMoving(false);
//8. Mask Robot將光罩從Load Port A / B Entry處, 移回Inspection Chamber
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
mt.ChangeDirection(pathFileObj.InspChHomePathFile());
ic.SetRobotIntrude(true);
mt.ExePathMove(pathFileObj.FromICHomeToICFrontSidePathFile());
mt.ExePathMove(pathFileObj.FromICFrontSideToICStagePathFile());
mt.RobotMoving(false);
//9. 雷射sensor可以偵測到Mask Robot進入Inspection Chamber &報值
About = ic.ReadRobotPosLeftRight();
UpDown = ic.ReadRobotPosUpDown();
//10. Mask Robot將光罩放置於Inspection Chamber Stage上
mt.Unclamp();
//11. (編號2-CCD): 開啟光源->拍照(FOV正確)->關閉光源
ic.LightForBackLineSetValue(120);
ic.Camera_SideDfs_CapToSave("D:/Image/IC/SigeDfs", "jpg");
ic.LightForBackLineSetValue(0);
//12. (編號3-CCD): 開啟光源->拍照(FOV正確)->關閉光源
ic.LightForLeftLineSetValue(255);
ic.LightForBackLineSetValue(255);
ic.LightForTopCrlDfsSetValue(39);
ic.Camera_TopDfs_CapToSave("D:/Image/IC/TopDfs", "jpg");
ic.LightForLeftLineSetValue(0);
ic.LightForBackLineSetValue(0);
ic.LightForTopCrlDfsSetValue(0);
//13. Mask Robot(無夾持光罩) 從Inspection Chamber移回Home點
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromICStageToICFrontSidePathFile());
mt.ExePathMove(pathFileObj.FromICFrontSideToICHomePathFile());
ic.SetRobotIntrude(false);
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.RobotMoving(false);
}
}
catch (Exception ex) { throw ex; }
}
public void TestMethod3()//OK
{
try
{
using (var halContext = new MacHalContext("UserData/Manifest/Manifest.xml.real"))
{
halContext.MvaCfBootup();
halContext.MvaCfLoad();
var unv = halContext.HalDevices[EnumMacDeviceId.eqp_assembly.ToString()] as MacHalEqp;
var mt = halContext.HalDevices[EnumMacDeviceId.masktransfer_assembly.ToString()] as MacHalMaskTransfer;
var lpa = halContext.HalDevices[EnumMacDeviceId.loadportA_assembly.ToString()] as MacHalLoadPort;
var lpb = halContext.HalDevices[EnumMacDeviceId.loadportA_assembly.ToString()] as MacHalLoadPort;
var os = halContext.HalDevices[EnumMacDeviceId.openstage_assembly.ToString()] as MacHalOpenStage;
unv.HalConnect();//需要先將MacHalUniversal建立連線，各Assembly的Hal建立連線時，才能讓PLC的連線成功
mt.HalConnect();
os.HalConnect();
lpa.HalConnect();
lpb.HalConnect();
uint BoxType = 1;//1：鐵盒 , 2：水晶盒
//1.光罩放置於Load Port A的Pod內
//2. Mask Robot從Home點移動至Load Port A上方
mt.RobotMoving(true);
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile());
mt.RobotMoving(false);
//3. Mask Robot在Load Port A進行光罩夾取
mt.Clamp(1);
//4. Mask Robot將光罩從Load Port A移動至Open Stage處 (不放置)
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile());
os.SetRobotIntrude(false, true);
mt.ExePathMove(pathFileObj.FromLPHomeToOSPathFile());
if (BoxType == 1)
{
mt.ExePathMove(pathFileObj.FromOSToIronBoxPathFile());
}
else if (BoxType == 2)
{
mt.ExePathMove(pathFileObj.FromOSToCrystalBoxPathFile());
}
mt.RobotMoving(false);
//5. Mask Robot將光罩從Open Stage, 移回Load Port A
mt.RobotMoving(true);
if (BoxType == 1)
{
mt.ExePathMove(pathFileObj.FromIronBoxToOSPathFile());
}
else if (BoxType == 2)
{
mt.ExePathMove(pathFileObj.FromCrystalBoxToOSPathFile());
}
mt.ExePathMove(pathFileObj.FromOSToLPHomePathFile());
os.SetRobotIntrude(false, false);
mt.ExePathMove(pathFileObj.FromLPHomeToLP1PathFile());
mt.RobotMoving(false);
//6. Mask Robot將光罩放置於Load Port A的Pod內
mt.Unclamp();
//7. Mask Robot (無夾持光罩) 從Load Port A移回Home點
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP1ToLPHomePathFile());
mt.RobotMoving(false);
//8. 重複1~7, 執行Load Port B至Open Stage的傳送測試
//1.光罩放置於Load Port B的Pod內
//2. Mask Robot從Home點移動至Load Port B上方
mt.RobotMoving(true);
mt.ChangeDirection(pathFileObj.LoadPortHomePathFile());
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.RobotMoving(false);
//3. Mask Robot在Load Port B進行光罩夾取
mt.Clamp(1);
//4. Mask Robot將光罩從Load Port B移動至Open Stage處 (不放置)
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
os.SetRobotIntrude(false, true);
mt.ExePathMove(pathFileObj.FromLPHomeToOSPathFile());
if (BoxType == 1)
{
mt.ExePathMove(pathFileObj.FromOSToIronBoxPathFile());
}
else if (BoxType == 2)
{
mt.ExePathMove(pathFileObj.FromOSToCrystalBoxPathFile());
}
mt.RobotMoving(false);
//5. Mask Robot將光罩從Open Stage, 移回Load Port B
mt.RobotMoving(true);
if (BoxType == 1)
{
mt.ExePathMove(pathFileObj.FromIronBoxToOSPathFile());
}
else if (BoxType == 2)
{
mt.ExePathMove(pathFileObj.FromCrystalBoxToOSPathFile());
}
mt.ExePathMove(pathFileObj.FromOSToLPHomePathFile());
os.SetRobotIntrude(false, false);
mt.ExePathMove(pathFileObj.FromLPHomeToLP2PathFile());
mt.RobotMoving(false);
//6. Mask Robot將光罩放置於Load Port B的Pod內
mt.Unclamp();
//7. Mask Robot (無夾持光罩) 從Load Port B移回Home點
mt.RobotMoving(true);
mt.ExePathMove(pathFileObj.FromLP2ToLPHomePathFile());
mt.RobotMoving(false);
}
}
catch (Exception ex) { throw ex; }
}